프로그램설계종합(예) Long-Wave-Pass Filter

1 Copyright 1 Long-Wave-Pass FilterSimple Specification:600nm - 50% transmittanceLow ripple to 850nmNo short-wave sidebandsMaterials Ta2O5 and SiO2 Simple Specification:600nm - 50% transmittanceLow ripple to 850nmNo short-wave sidebandsMaterials Ta2O5 and SiO2 LWPARS idebandblockerCementBK 7AR ( )Copyright 2 Material 1. Cement : Dispersion index of .2. N-BK7 Material Folder Schott 2004 , OG 570b,OG570 Schott Filter Import .Material Import . 1. Tools > Materials 2. Edit >import 1. New > Material2. Save As1. 2. 3. Substartes import Copyright 3 Design File BK 7 : substrate , Cement : Incident medium. , File > Design. , Edit > Formula.(HL)^17 HCopyright 4 Getting the Correct Reference WavelengthEdge 600nm reference wavelength.

2 , File > Performance > Active Plot. , Add > reference wavelength,Copyright 5 Setting Up for Refinement , Parameters > refinement > Targets , Edit > GenerateData New .Copyright 6 Design file , lock/Link > Lock All 5 Layer 5 Layer Lock No Copyright 7 Ripple Refinement , Parameters > Refinement > SimplexCopyright 8 Performance of the Long Wave Pass FilterCopyright 9 The Antireflection Coating , Tools > Analysis > AdmittanceCopyright 10 Complete Performance Modeled by Stack , File > New > StackStack AR Coating .Copyright 11 Stack vStack .Front Materialspecifies the material in which the light is incident on the surface.

3 Back Materialspecifies the material on the other side of the surface from the front material. Surface Anglespecifies the angle that the surface normal makes with the reference direction Transfer Modespecifies the component of light that is transferred from one surface to the next. This parameter has seven values: Transmit: The transmitted portion of the beam is propagated to the next surface and the reflected beam is : The reflected portion of the beam is propagated to the next surface and the transmitted beam is Reflect: This special mode reflects 100% of the beam and propagates it to the next 0: This special mode rotates the beam 90 degrees about its axis and propagates it to the next 90: This special mode has no effect on the beam and propagates it to the next surface. It is included to make it easy to switch off any of the rotations listed 180: This special mode rotates the beam 180degrees about its axis and propagates it to the next -90: This special mode rotates the beam 270 degrees about its axis and propagates it to the next surface.

4 Perfect Retro: This special mode reflects 100% of the beam back along the direction that it entered and propagates it to the next surface. vStack Data : Stack Data Copyright 12 RunSheet Simulator ( ) . 1. Machine Configuration Coating machine, monitoring systems, sources, tooling factors, monitoring chips , .2. RunSheet layer thickness monitoring signals .3. Simulator RunSheet errors in tooling factors, wavelength, packing density, temperature signal noise (Simulation) . RunSheet Simulator ( ) . 1. Machine Configuration Coating machine, monitoring systems, sources, tooling factors, monitoring chips , .2. RunSheet layer thickness monitoring signals .3. Simulator RunSheet errors in tooling factors, wavelength, packing density, temperature signal noise (Simulation).

5 ( ) Copyright 13 Machine ConfigurationRunSheet Machine Configuration General, Sources Monitoring Chips , Wideband . Simulator Edge Filter , . optical tooling factors . , File > New > Machine ConfigurationCopyright 14 RunSheetDefault values can then be changed easily by Global Editor manually. , File > New > RunSheet , Edit > ParametersCopyright 15 , RunSheet > Calculate , RunSheet > Plot one ChipChip, Monitoring chips Titania Layer Silica . Chip Chip .Copyright 16 , RunSheet > Plot one ChipChip, Run Sheet File > Export > CSV File ( a comma-separated variable) Note Coating Controller.

6 Run Sheet File > Export > CSV File ( a comma-separated variable) Note Coating Controller .Copyright 17 SimulatorSimulator .Simulator .Copyright 18 Monitoring SimulationSimulato overshoot , Layer .Prescribed signal changeNoiseExtremumSignalExtremum existence recognized hereOvershootTerminationCopyright 19 SimulatorStandard deviation for optical signal noise : 1 .Minimum signal change signal noise 4 .Copyright 20 : The signal during the monitoring of the first layer on the first chipSimulator 10 Copyright 21 Signal Errors standard deviation : , Optical Monitor minimum signal change : 2% Simulation Edge 600nm tooling factor errors temperature Simulation.

7 Copyright 22 Theoretical Performance of the Final Desig