MEMS・マイクロ流路・圧電デバイス事例 - KESCO

1 MEMS . comsol conference 2008. And 2009 list Presentation ( World wide ). comsol conference 2008 world wide CD . CD 300 .. Interfacing Continuum and Discrete Methods: Convective Diffusion of Microparticles and Chemical Species in Microsystems J. Berthier, CEA-LETI, Department of Biotechnology, Grenoble, France . Navier-Stokes .. Navier-Stokes . comsol .. comsol OptiY . Design for Reliability and Robustness through Probabilistic Methods in comsol Multiphysics with OptiY. Pham1, H. Neubert2, and A. Kamusella2. 1. OptiY , Aschaffenburg, Germany 2. Institute of Electro-Mechanical and Electronic Design, TU Dresden, Germany . MEMS MEMS .. , OptiY.

2 (Response surface) . MEMS comsol D.. Improved Design of a Channel Flow Micro Heat Exchanger using Vortex Promoters M. Meis1, F. Varas1, A. Vel zquez2, and Vega2. 1. Universidad de Vigo, Spain 2. Universidad Polit cnica de Madrid, Spain .. comsol . SUPG SUPG .. Electro-Thermal Modeling of High Power Light Emitting Diodes Based on Experimental Device Characterization T. Lopez1, and T. Margalith2. 1. Philips Research, Aachen, Germany 2. Philips Lumileds Lighting Company, San Jose, CA, USA.. LED die InGaN/GaN flip-chip LED. COMOSL . comsol AR. Active region .. Design and Analysis of Stacked Micromirrors S. Park, S. Chung, and J. Yeow University of Waterloo, Systems Design Engineering, Waterloo, Ontario, Canada.

3 RF .. comsol . comsol MATLAB . Design of an Electrodynamically Actuated Microvalve Using comsol Multiphysics and MATLAB . M. Williams, J. Zito, J. Agashe, A. Sopeju, and D. Arnold University of Florida, Gainesville, USA.. m .. comsol MATLAB MATLAB fmincon .. comsol . Designing Piezoelectric Interdigitated Microactuators using comsol . O. Myers 1, M. Anjanappa 2, and C. Freidhoff 3. 1. Mississippi State University, Mississippi State, MS, USA. 2. University of Maryland Baltimore County, Baltimore, MD, USA. 3. Northrop Grumman Corporation, Electronics Systems Sector, Baltimore, MD, USA.. comsol .. Fluidmechanical Damping Analysis of Resonant Micromirrors with Out-of-plane Comb Drive T.

4 Klose1, H. Conrad2, T. Sandner1, and H. Schenk1. 1. Fraunhofer Institute Photonic Microsystems (FhG-IPMS), Germany 2. TU Dresden, Semiconductor and Microsystems Technology Laboratory, Germany . IPMS MEMS .. Navier-Stokes .. SQUID . Micro Cooling of SQUID Sensor B. Ottosson1, Y. Jouahri2, C. Rusu1, and P. Enoksson2. 1. Imego AB, Gothenburg, Sweden 2. Chalmers University of Technology, Gothenburg, Sweden . SQUID MRI immunoassays analyte High-TC SQUID 77K .. comsol K .. Modeling of Vibrating Atomic Force Microscope s Cantilever within Different Frames of Reference E. Kamau, and F. Voigt University of Oldenburg, Germany . AFM .. comsol .

5 Simulation of Topology Optimized Electrothermal Microgrippers O. Sardan1, D. Petersen1, O. Sigmund2, and P. Boggild1. 1. DTU Nanotech, Denmark 2. DTU Mechanical Engineering, Denmark .. comsol .. Development and Characterization of High Frequency Bulk Mode Resonators H. Pakdast, Z. Davis DTU Nanotech, Technical University of Denmark, Kgs. Lyngby, Denmark . NEMS, MEMS . DNA . comsol . Q .. Investigating the Use of a Piezoelectric Actuator for the Appendages of a Microrobot J. Clark, and J. Clark Purdue University, West Lafayette, IN, USA.. comsol . MEMS . Modeling and Characterization of Superconducting MEMS for Microwave Applications in Radioastronomy N.

6 Al Cheikh1, P. Xavier1, J. Duchamp1, and K. Schuster2. 1. Institute of Microelectronics, Electromagnetism and Photonics (IMEP-LAHC), Grenoble, France 2. Institute of Millimetrics Radio Astronomy (IRAM), Grenoble, France .. GH GH . MEMS comsol . SupraMEMS .. comsol SAW . Simulation of Unidirectional Interdigital Transducers in SAW Devices using comsol Multiphysics D. Pradeep, N. Krishnan, and H. Nemade Department of Electronics and Communication Engineering, Indian Institute of Technology Guwahati, India . SAW APM . IDT interdigital . IDT SAW UDT IDT SAW . UDT FEUDT comsol YZ.. Designing the Actuator for the Next-Generation Astronomical Deformable Mirrors: a Multidisciplinary and Multiphysics Approach C.

7 Del Vecchio1, R. Biasi2 , D. Gallieni3, and A. Riccardi1. 1. INAF-OAA, Fierenze, Italy 2. Microgate Srl, Bolzano, Italy 3. ADS International Srl, Valmadrera, Italy .. comsol . comsol .. Development of optically and magnetically driven micro fluidic devices . , .. U .. comsol .. Polymer-based Magnetically Driven Microtool for On-chip Particle Sorting 1. , .. (MMT) . MMT . MMT .. comsol . MEMS and Piezoelectric Devices : comsol conference 2009. A Study of Curved Flexures for MEMS. Minhee Jun1, and Jason V. Clark1. 1. Departments of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA. Large deflection actuators are becoming increasingly important for microsystems.

8 Since actuation forces are usually small, large deflection actuators usually require flexures with low stiffness. Rectangular serpentine flexures are often used for such actuators due to their low stiffness and large linear deflection range. In this paper we investigate the performance of curved serpentine flexures to the performance of rectangular serpentine flexures. We test geometric process variations, linearity range, stress, strength, quality factor, electrical conductivity, and thermal conductivity in comsol simulation with the expectation of excellent performance of CSF. Plot of the electric field in the rectangular serpentine flexure (RSF) & curved serpentine flexure (CSF) using comsol Multiphysics.

9 A Study of Lubricating Flows in MEMS Bearings E. Gutierrez-Miravete1, and J. Streeter2. 1. Department of Engineering and Science, Rensselaer at Hartford, Hartford, Connecticut, USA. 2. Optiwind, Torrington, Connecticut, USA. The bearing and shaft are part of a safe and arm device constructed as an assembly by a multi-layer additive/subtractive plating and planarization processes (EFAB technology). Devices are constructed by a multi-layer additive/subtractive planarization process. This paper evaluates the lubricating flow between the shaft and journal of the MEMS bearing for seven configurations. The pressure differential was used to rank the designs.

10 In this work the lubricating behavior of a MEMS bearing has been investigated using the CFD module in comsol . Multiphysics. Plot is Computed results for the 6-nozzle bearing with 0 Offset. Computing Surface Acoustic Wave Dispersion and Band Gaps R. Westafer1, S. Mohammadi1, A. Adibi1, and W. Hunt1. 1. School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia, USA. The dispersion of surface acoustic waves (SAWs) has long been studied for diverse applications ranging from seismic waves to microelectronic filters. In this work, we apply comsol Multiphysics software for the finite element investigation of SAW dispersion in two inhomogeneous materials: (a) layered structures, and (b).