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MODEL 265/270/271 MULTI-POCKET - EB Sources

MODEL 265/270/271 MULTI-POCKETELECTRON BEAM SOURCEINSTRUCTION MANUALPart Number 271-0001-1 Copyright TELEMARK,1991-2004 - All rights reservedFeb, and product names are trademarks orregistered trademarks of their respective 265/270/271 Electron Beam SourceSAFETY WARNINGHIGH (POTENTIALLY LETHAL) VOLTAGES ARE PRESENT WITHIN ANEVAPORATION SYSTEM. GREAT CARE MUST BE EXERCISED WHENPERFORMING CONTACT WITH THE VOLTAGESCAN BE ALL HV FEEDTHRU CONNECTIONS WITH A GROUNDING - HIGH VOLTAGEiiiTelemark 265/270/271 Electron Beam SourceWARRANTYThis Electron Beam Source is guaranteed against faulty materials andworkmanship for a period of 12 months after delivery from warranty is valid only for normal use where regular maintenance is performedas instructed.

ii telemark 265/270/271 electron beam source safety warning high (potentially lethal) voltages are present within an evaporation system. great care must be exercised when

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Transcription of MODEL 265/270/271 MULTI-POCKET - EB Sources

1 MODEL 265/270/271 MULTI-POCKETELECTRON BEAM SOURCEINSTRUCTION MANUALPart Number 271-0001-1 Copyright TELEMARK,1991-2004 - All rights reservedFeb, and product names are trademarks orregistered trademarks of their respective 265/270/271 Electron Beam SourceSAFETY WARNINGHIGH (POTENTIALLY LETHAL) VOLTAGES ARE PRESENT WITHIN ANEVAPORATION SYSTEM. GREAT CARE MUST BE EXERCISED WHENPERFORMING CONTACT WITH THE VOLTAGESCAN BE ALL HV FEEDTHRU CONNECTIONS WITH A GROUNDING - HIGH VOLTAGEiiiTelemark 265/270/271 Electron Beam SourceWARRANTYThis Electron Beam Source is guaranteed against faulty materials andworkmanship for a period of 12 months after delivery from warranty is valid only for normal use where regular maintenance is performedas instructed.

2 This warranty shall not apply if repair has been performed or analteration made by anyone other than an authorized Telemark representative or ifa malfunction occurs through abuse, misuse, negligence, or accident. No chargewill be made for repairs made under warranty at Telemark s facilities. Defectiveparts will be repaired or replaced at Telemark s option. Customer will beresponsible for freight charges to Telemark s the safety of the Telemark Technicians customers are requested to supply alist of materials which have been evaporated in the crucible when the E-source isreturned for RESPONSIBILITYThe user is responsible for proper operation and ordinary maintenance of theequipment, following procedures described in this manual, including referencedocuments.

3 Proper operation includes timely replacement of parts that aremissing, broken, or plainly worn. If the user has a reasonable doubt aboutunderstanding the use or installation of a component, Telemark or your localrepresentative should be is vitally important that the user properly install the equipment as described inChapter 3 (Installation) of this manual, with particular attention to correct groundingmethods as described in Chapter Warranty will be void if the equipment isimproperly installed and/or improperly of the design or any function of the equipment voids the warranty and isentirely the responsibility of the 265/270/271 Electron Beam SourceTABLE OF CONTENTSSAFETY WARNINGWARRANTYUSER RESPONSIBILITYLIST OF ILLUSTRATIONS1 UNPACKINGI nstallation Tank of Accessories or 265/270/271 Electron Beam Source4 OPERATIONG eneral Operation - Operation - the Electromagnetic Disassembly and Rotation Quick Drive Drive

4 Plate OF ILLUSTRATIONSP hoto TitlePage1 Source and Installation Insertion Cone Crucible Crucible Water Water Crucible Rotation Magnet Front Shield : photos of 271 E-sourceFigure TitlePage2-A265 Source Reference Source Reference Wire Reference Ground Tank Grounding Rotation Assembly, Side Rotation Assembly, Bottom Drive Drive Main Main Main 265/270/271 Electron Beam Source1 UNPACKINGYour MODEL 265/270/271 electron beam source is packed into a specially designeddouble strength box surrounded with two inches of rigid foam padding. Sincepackaging the source for safe shipment is otherwise difficult, please save the boxin the event that the source may ever need to be returned for servicing.

5 We cannotbe held liable, and may not be able to fix without charge, Sources which aredamaged in transit as a result of improper the box will be the source, this manual and spare parts kit including a set oftools. Please check the package against the list on page 1-2 to make sure all partsare present. Also check that no damage has occurred in transit. Inspect the emitterassembly for alignment of the filament, anode plate and beam former. The sourceis ruggedly built and packaged tightly so no damage should occur. In the event ofany deficiencies please report them to your vendor immediately. Also take care toread the warranty on page ii as to the limits of our finish on your source is the highest available on both copper and stainlesssteel.

6 The source is assembled under clean conditions and sealed in apolyethylene bag for shipment. A set of gloves is provided for your use inunpacking and setting up the source to help you minimize 265/270/271 Electron Beam SourceInstallation KitPart #265-0723-1, Shipped with 265 E-SourcePart #271-0723-1, Shipped with 270/271 E-SourcePart 265/270/271 Electron Beam SourcePhoto 1 Source andInstallationKit2 DESCRIPTIONThe source s most notable features are:1 The crucible is removable from above by simply removing thecopper crucible cover, loosening the crucible screws,attaching the thumbscrew in the center-tapped hole of thecrucible, and lifting up.

7 This is described and illustrated onpage 5-1. The crucible can be glass bead honed (takingappropriate care not to damage the O-ring seat) and otherwisecleaned without disassembling the entire source. Do not use asand emitter assembly is a critical component in the operation ofthe E-source. The parts that make up the emitter assembly aremanufactured to exacting standards. Telemark has developedseveral innovative changes in the emitter assembly which makeit more reliable and easier to assemble. The assembly isoutlined in chapter main rotary seal is a single piece and is made to closetolerances. Both O-ring and Quad-rings may be used in it withequally satisfactory results.

8 Per the photo on page 5-10 aninsertion cone is provided for use when slipping the cruciblebase onto the pivot shaft. This single piece design, combinedwith a low torque drive and a flared space in front of thecrucible, has almost eliminated rotary : The insertion cone is a Telemark exclusive. It is crucial in theassembly of crucible base to the pivot to prevent damage to theQuad-ring sealing 265/270/271 Electron Beam Source4 The space between the front of the crucible and the front shieldis flared, expanding gradually from center to outside in bothdirections. The crucible itself has a double lip design. Boththese steps were taken to essentially eliminate the possibilitythat chips of brittle materials, such as quartz and sapphirecould, during production, fall out of the pockets and jam thecrucible rotation.

9 The elimination of jamming means that thecrucible rotation can be reliably automated for production usinga motor sweep coils are housed in a water-cooled solid copperblock. The sweep electrodes are also protected by a ruggedhousing. This means that the chance of damaging the coilsthermally or mechanically during normal production or handlingis virtually eliminated, so long as the water outflow interlock isnot overridden (see section on interlocks) and care is taken not2-2 DESCRIPTIONT elemark 265/270/271 Electron Beam SourceFigure 2-A265 ReferenceDimensions# of Pkts A [ ] [ ] [ ]to change the connector pins when connecting the features, such as long-lasting all stainless steel drivegears, heavy-duty #10-32 screws in all important fasteninglocations with Helicoil inserts in the copper and heavy-dutyconstruction all round, are designed to make the sourceserviceable for years of 265/270/271 Electron Beam SourceFigure 2-B270/271 ReferenceDimensions#ofPktsSize A B MODEL , 15,25, 30.

10 25cc E-source270/271 E-sourceElectron Beam Deflection270 270 Power Rating10 kW10 kWMaximum High Voltage10 kV10 kVHigh Voltage Range4kVto10kV4kVto10kVLateral Coil ohmsLongitudinal Coil ohmsEmission CurrentUp to 1 Amp @ 10 kVUp to 1 amp @ 10kV (271)Up to 1 amp @7 kV (270,dielectric only)Filament Power600 watts maximum(50 amps at 12 VAC max).600 watts maximum(50 amps at 12 VAC max)Sweep Lateral Coil+ amps+ ampsSweep Longitudinal Coil+ amps+ ampsWater RequirementsInput water temperature shouldbe 60 F (15 C) at a pressure of60 psi ( kg/cm2), using a 3/8"(10 mm) gpm (min.) at 10 kW3 gpm (min.)


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