Model 5850E Mass Flow Controller - Flow Meters & …

1 Installation and Operation ManualX-TMF- 5850E -MFC-engPart Number: 541B102 AAGS eptember, 2009 Brooks Model 5850 EModel 5850 EMass Flow ControllerModel 5850 EMass Flow Controllerwith Card Edge ConnectorModel 5850 EMass Flow Controllerwith D-ConnectorInstallation and Operation ManualX-TMF- 5850E -MFC-engPart Number: 541B102 AAGS eptember, 2009 Brooks Model 5850 EESD (Electrostatic Discharge)Essential InstructionsRead this page before proceeding!Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Becausethese instruments are sophisticated technical products, you must properly install, use and maintain them to ensure theycontinue to operate within their normal specifications.

2 The following instructions must be adhered to and integrated into yoursafety program when installing, using and maintaining Brooks Products. Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correctmanual, please see back cover for local sales office contact information. Save this instruction manual for future reference. If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification. Follow all warnings, cautions and instructions marked on and supplied with the product. Inform and educate your personnel in the proper installation, operation and maintenance of the product. Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicablelocal and national codes.

3 Connect all products to the proper electrical and pressure sources. To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product. When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks parts and procedures can affect the product's performance and place the safe operation of your process atrisk. Look-alike substitutions may result in fire, electrical hazards or improper operation. Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is beingperformed by qualified persons, to prevent electrical shock and personal Equipment Directive (PED)All pressure equipment with an internal pressure greater than bar (g) and a size larger than 25mm or 1" (inch) falls under thePressure Equipment Directive (PED).

4 The Directive is applicable within the European Economic Area (EU plus Norway, Icelandand Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with. Section 1 of this manual contains important safety and operating instructions related to the PED directive. Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment. All Brooks Instrument Flowmeters fall under fluid group 1. Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED. Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).Handling Procedure:1. Power to unit must be Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internaldevice is installed, removed or Printed circuit cards must be transported in a conductive container.

5 Boards must not be removed from protective enclosureuntil immediately before installation. Removed boards must immediately be placed in protective container for transport,storage or return to instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronicdesigns contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even smallamounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to functionproperly, exhibit early and Operation ManualX-TMF- 5850E -MFC-engPart Number: 541B102 AAGS eptember, 2009 Brooks Model 5850 EDear Customer,We appreciate this opportunity to service your flow measurement and control requirements with a BrooksInstrument device.

6 Every day, flow customers all over the world turn to Brooks Instrument for solutions to theirgas and liquid low-flow applications. Brooks provides an array of flow measurement and control products forvarious industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,analytical instrumentation, semiconductor manufacturing, and Brooks product you have just received is of the highest quality available, offering superior performance,reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirementsand hostile process environments in mind to provide you with a lifetime of dependable recommend that you read this manual in its entirety.

7 Should you require any additional information concerningBrooks products and services, please contact your local Brooks Sales and Service Office listed on the back coverof this manual or visit sincerely,Brooks InstrumentInstallation and Operation ManualX-TMF- 5850E -MFC-engPart Number: 541B102 AAGS eptember, 2009 Brooks Model 5850 ETHIS PAGE WASINTENTIONALLYLEFT BLANKiContentsBrooks Model 5850 EInstallation and Operation ManualX-TMF- 5850E -MFC-engPart Number: 541B102 AAGS eptember, 2009 Section 1-3 Section 2 Installation2-1 Receipt of 2-12-2 Recommended Storage 2-12-3 Return 2-22-4 Gas 2-32-6In-Line 2-62-7 Soft Start .. 2-72-8 Remote Setpoint (Command) Input .. 2-72-9 Valve Override .. 2-82-10 Remote Transducer Input.

8 2-82-11 Valve Test 2-82-12 Valve Off .. 2-92-13 Five Volt Reference Output/Valve Drive Configuration ..2-9 Section 3 Operation3-1 Theory of Operation .. 3-13-2 Operating 3-33-3 Zero 3-33-4 Calibration 4 Maintenance & 4-24-3 Sensor Tube .. 4-64-4 Disassembly and Assembly .. 4-64-5 Gas Conversion Factors .. 4-134-6 Orifice Model 5850 EInstallation and Operation ManualX-TMF- 5850E -MFC-engPart Number: 541B102 AAGS eptember, 2009 ContentsSection 5 Parts 5-1 Section ACE Certification CE Certification of mass Flow A-1 Warranty, Sales/Service Contact Information .. Back CoverFiguresFigureNumberPage1-1 Command Steps, Soft Start 1-21-20-100% Command Step, Soft Start Enabled .. 1-22-1 Model 5850E Dimensions.

9 2-32-2 Model 5850E Card Edge Connector Comparison Guide .. 2-42-3 Model 5850E Card Edge Connector Hookup Diagram .. 2-52-4D-Type Connector Pin 2-53-1 Flow Sensor Operational Diagram .. 3-23-2 Flow Control System Block Diagram .. 3-33-3 Card Edge PC Board Jumper Location & Function .. 3-43-4D-Connector PC Board Jumper Location & Function .. 3-53-5 Model 5850E Calibration Connections .. 3-63-6 Adjustment Potentiometer Location .. 3-93-7 Fast Response 3-114-1 Torque Sequence for the Valve Retainer Plate .. 4-74-2aValve Adjusting Spacer Locations ( ).. 4-114-2bValve Adjusting Spacer Locations ( ).. 4-124-3 Voltmeter Connections for Valve Adjustment ..4-144-4 Example 5850E Parts Drawing .. 5-1 TablesTableNumberPage2-1 Recommended Filter Size.

10 2-64-1 Bench 4-44-2 Sensor 4-54-3 Conversion Factors (Nitrogen Base) .. 4-154-4 Model 5850E Orifice Sizing 4-194-5 Model 5850E Standard 4-235-1 Model 5850E Replacement Parts List .. 5-25-2 Tool and Spare Part Kits for 5850E Series .. 5-41-1 Section 1 IntroductionBrooks Model 5850 EInstallation and Operation ManualX-TMF- 5850E -MFC-engPart Number: 541B102 AAGS eptember, 20091-1 PurposeThe Brooks Model 5850E Flow Controller is a mass flow measurementdevice designed for accurately measuring and rapidly controlling flows ofgases. This instruction manual is intended to provide the user with all theinformation necessary to install, operate and maintain the Brooks 5850 EMass Flow Controller . This manual is organized into five sections:Section 1 IntroductionSection 2 InstallationSection 3 OperationSection 4 Maintenance & TroubleshootingSection 5 Replacement PartsBack CoverWarranty, Local Sales/Service Contact InformationIt is recommended that this manual be read in its entirety before attemptingto operate or repair the Model DescriptionThe Brooks Model 5850E mass Flow Controller is used widely in theSemiconductor Industry as well as many others, where manual, electronicor computer controlled gas handling occurs.