N-111 NEXLINE OEM Linear Actuator - PI USA

1 Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new newest release for data sheets is available for download at R1 10/01 Nano PositioningThe innovative N-111 NEX-LINE OEM Linear actuators arecompact actuators for nanopo-sitioning with travel ranges to10 mm, high resolution, andgenerated forces to 50 N. Theoperating principle is based oncoordinated motion of a num-ber of highly preloaded linearand shear piezo elements act-ing on a runner. NEXLINE drives thus combine long trav-el ranges with piezo-class pre-cision. For closed-loop opera-tion without an additional posi-tion sensor the isequipped with a Linear encoderthat provides 5 nm resolutionover the full travel range.

2 Inopen-loop operation positionresolution down to 25 pico-meters can be achieved by useof a high-dynamics Working Principlefor Application FlexibilityNEXLINE PiezoWalk drivescan be used wherever highloads must be positioned veryprecisely over long distancesand then perhaps subjected tosmall-amplitude dynamic ad-justment, as for active vibra-tion control. By varying thecombination of longitudinaland shear piezo elements, thestep size, dynamic operatingrange (analog travel), clampingforce, speed and stiffness canall be optimized for a Working Principle Different Operating ModesNEXLINE PiezoWalk drivesovercome the limitations ofconventional nanopositioningsystems in their combinationof long travel ranges and highresolution and stiffness.

3 Thepiezoceramic clamping andshear elements act directly onamovingrunnerthatiscou-pled to the moved in full step mode the run-ner can be moved over largerdistances with maximumvelocity, nanostepping modeallows uniform motion withhighly constant speed. In open-loop operation any positionresolution may be achievedwhich only depends on thestability of the control operation over a dis-tance of less than one stepenables high-dynamics posi-tioning with resolutions farbelow one of Controllersfor OptimizationNEXLINE operation is support-ed by two motion controllermodels providing different fea-tures. The E-755 controlleroffers full functionality fornanometer precise E-712 supplies moresophisticated linearizationalgorithms resulting in verysmooth motion with highlyconstant velocity.

4 It can alsoprovide higher speed withmaximum TechnologyThe products described in thisdocument are in part protectedby the following patents:German Patent No. 10148267US Patent No. 6,800,984N-111 NEXLINE OEM Linear ActuatorNanopositioning Over Long Travel, PiezoWalk Principle Travel Range 10 mm Resolutionto nm Open-Loop, 5 nm Closed-Loop Up To 50 N Force Generation and 70 N Holding Force Self Locking at Rest, No Heat Generation Non-Magnetic and Vacuum-Compatible Working Principle Cleanroom CompatibleOrdering OEM Piezo SteppingActuator, 10 mm, 50 OEM Piezo SteppingActuator, 10 mm, 50 N, Linear Encoder, 5 nm ResolutionAsk about custom designs! N-111 compactOEM nanopositioning principle the movement bypiezo steps allows an infinitetravel rangeApplication Examples Semiconductor technology Semiconductor testing Wafer inspection Nano lithography Nano-imprinting Nanometrology Active vibration damping Motion in strongmagnetic fieldsZ / tip / tilt platform with NEXLINE drives and position sensors;300 mm (12'') diameter, 200 N load capacity, mm travel range, 10 mrad tilt rangePiezo Nano PositioningTechnical axesXXMotion and positioningTravel range10 mm10 mmStep size (in step mode)10 nm to 7 m10 nm to 7 mTravel range in analog mode 2 m 2 mIntegrated sensor Linear encoderOpen-loop resolution 5 nmMax.

5 Velocity (10% duty cycle, full step mode)* mm/sMax. velocity (100 % duty cycle, full step mode)* mm/sMax. velocity (100 % duty cycle, nanostepping mode)** mm/sMechanical propertiesStiffness in motion direction16 N/ m16 N/ m 20%Drive force (active)**50 N50 force (passive)70 N70 propertiesMotor typeNEXLINE NEXLINE Operating voltage 250 V 250 VMiscellaneousOperating temperature range-40 to 80 C-40 to 80 CMaterialAluminiumAluminiumstainless steel,stainless steel,titaniumtitaniumMass245 g325 gCable m 10 mmConnectorSub-D connectorSub-D connectorNEXLINE NEXLINE single-channelsingle-channel plussensor connectorRecommended controllerE-755,101, , E-712* Depending on drive electronics. Data refer to operation together with E-712 controller.

6 ** Depending on drive electronics. Data refer to operation together with E-712 controller. Together with the E-755 controller a velocity of up to mm/s(closed-loop) and mm/s (open-loop) can be achieved. The maximum speed in nanostepping mode is set so as to ensure the highest possible veloc-ity constancy, with no speed fluctuations while steps are being performed.** Data refer to full step mode & Stepper ActuatorsPiezo Actuators & ComponentsPiezoWalk Motors / ActuatorsPILine Ultrasonic MotorsNanopositioning / PiezoelectricsLinear Actuators & MotorsUnpackaged Stack ActuatorsGuided / Preloaded ActuatorsNanometrologyMicropositioningPa tches / Benders / Tubes / dimensions in dimensions in mm