PASCO CMP Parts - H-Square

1 2016 H-Square Corporation 16-1553100 Patrick Henry Drive Santa Clara, california , United States 95054 +1 408 982 9108 PASCO Precision is an high quality engineering design and manufacturing group located in South-ern Taiwan. The company was founded in 2005 and started manufacturing in 2007 for some of the most notable semiconductor operations in their core focus is on the design and manu-facturing of Semiconductor CMP Parts and consum-ables (membrane, engineering plastic Parts , rubber seals), ECP Parts (cationic membrane), Etch Parts (VESPEL, PBI), and solar photovoltaics wet bench rollers, bearing strip (support) and gear CMP PartsCustomized design mechanical Parts and assembly consumable CMP partsRubber mold design and manufacturingDesign and technological support Material design and manufacturing expertise in: Engineering Plastic : PVDF, PTFE , PE, PEEK, POM, PETP, PBI and VESPEL Rubber: Silicone, EPDM , VITON(FKM), Metal machining.

2 Stainless (316L, 316, 304), ALNoteable CMP Tool platforms supported: Applied Materials Refl exion LK/LKGT Applied Materials Mirra Mesa Ebara F-Rex300/300s/300S2 Noteable ECP Tool Platforms supported : Lam Research (formerly Novellus) Sabre 2016 H-Square Corporation 16-1553100 Patrick Henry Drive Santa Clara, california , United States 95054 +1 408 982 9108 PASCO CMP PartsDESCRIPTIONMEMBRANE TITAN PROFILER 5 ZONECONTOUR MEMBRANESILICONE COATED MEMBRANE, 3 ZONEPROFILER SILICONE COATED MEMBRANE6 ZONE MEMBRANEMEMBRANE G2 (LcW)MEMBRANE Tcnh T2-2 (AGW) G2 SMEMBRANE TCHNH T2-2 MEMBRANE G3V2 RMEMBRANE DRIVE ROLLER BRUSH MODULE, 300 MMIDLERWASHER ROLLER, TEXTURED SURFACE, BRUSH MROLLING SEAL FOR SP1 HEAD (TRANSPARENT)ROLLING SEAL, 300MM TITAN PROFILER (BLACK)ROLLING SEAL, 300MM TITAN PROFILER (BLUE)ROLLING SEAL, 300MM TOTAL PROFILERBELLOWS, BRUSH MODULE, 300MM, DESICAROLLER CHUCK (90A)ROLLER CHUCK (95A)ROLLER CHUCK (98A)

3 BRUSH MOUNT ACTUATORGEAR ASSEMBLYROLLER ASSEEMBLYEXTENDED MEGA ROLLER (pat)MEGA HOUSINGIDLER ASSEMBLYLK BRUSH MOUNTPUSHER MODULECRESENT DRIVECROSS COVER, SMALLCROSS COVER, BIGPOCKET BLADEQCUPPER COVERDOWN COVERDRESSER COVERZOOM COVERBAND, TR WATER SEAL MCATIONIC MEMBRANEAPPLICATION TOOLAMAT REFLEXIONAMAT REFLEXION LK/GTAMAT REFLEXIONAMAT REFLEXIONAMAT REFLEXIONEBARA F-REX300 EBARA F-REX300 SEBARA F-REX300 SEBARA F-REX300 EBARA F-REX300S2 AMAT REFLEXION LKAMAT REFLEXION LKAMAT REFLEXIONAMAT REFLEXIONAMAT REFLEXIONAMAT REFLEXION LKAMAT REFLEXION LKAMAT REFLEXION LKEBARA F-REX300 EBARA F-REX300 SEBARA F-REX300S2 AMAT REFLEXIONAMAT REFLEXIONAMAT REFLEXIONAMAT REFLEXION LK/GTAMAT REFLEXION LK/GTAMAT REFLEXION LK/GTAMAT REFLEXION LK/GTAMAT REFLEXION LK/GTAMAT REFLEXION LK/GTAMAT REFLEXION LK/GTAMAT REFLEXION LK/GTAMAT REFLEXION LK/GTAMAT REFLEXION LK/GTEBARA FREX-300 EBARA FREX-300 EBARA FREX-300 EBARA FREX-300 EBARA FREX-300 NOVELLUS SABRE ECPOEM PART NUMBER0021-34033

4 (0020-75118)0020-838890021-337810021-338 08 (0020-75119)0020-86954C-4111-176-0001C-4 000-015-0700C-411-184-0001C-4111-295-010 1C-4000-016-08000021-266070020-900150021 -260340020-153340020-229580020-535810030 -005950190-19949C-1385-018-0001C-1385-11 5-0001C-1385-116-10010010-19290 / 0010-192910010-193120040-866650040-87418 0021-796440010-199450010-237520040-75842 0040-758430041-28404 REV20041-28291 REV 3C-3112-135-0021C-3130-008-220016-346622 -00 PASCO PART NUMBERPRP03053514 PLKP03053614 PRP03053614 PRP03053214 PLKP03053914 PEP03053814 PEP03053914 PEP03053914 PEP03053514 PEP03053714 PLKCO3035011 PRC03030511 PMC02080611 PRP03160314 PLKP03160214 PRP03160214 PLKP03160521 PLKC03014612 PEC03080111 PEC03080311 PEC03080411 PRC030100-1 / PRC030100-2 PRC030200 PRC030300 PRC03070006 PMC02120006 PLKC03110006

5 PLKC030100 PLKC031700 PLKC032200 PLKP03210210 PLKP03210210 PLKC03190106 PRC03980107 PEP030300 PEP030400 PESPO3280124 PEP030600 PES2P031814 PSBR030100