Pendulum valve control system Series 65 Series 650

1 YxValve with integrated controllerBody materialaluminum or aluminum hard anodizedAccessoriesOrdering example: 65040-PAGG= aluminum valve with ISO-F DN 100 flanges, RS232 interface, for 1 sensorDNOrdering numbersaluminumaluminum hard anodizedmminchISO-FJISISO-FJIS 100 465040 -PAxy65040-JAxy65040-PHxy65040-JHxy 160 66 5 0 4 4 - P A xy6 5 0 4 4 - J A xy6 5 0 4 4 - P H xy65044-JH xy 200 865046-PA xy65046-JA xy65046-PH xy65046-JH xy 250 1065048-PA xy65048-JA xy65048-PH xy6 5 0 4 8 - J H xy 320 1265050-PA xy65050-JA xy65050-PH xy65050-JH xy 350 14 6 5 0 5 1 - J A xy 65051-JH xy 400 1665052-PA xy65052-JA xy65052-PH xy6 5 0 5 2- J H xyDownstream pressure control and isolation

2 ValveCompact designFast, virtually particle-free and shock-free operationHigh-performance, integrated controllerSeries 650 1) 2)G = RS232 1H = RS232 2C = Logic 1E = Logic 2P = DeviceNet 1Q = DeviceNet 2D = Profibus 1F = Profibus 2 1) 2) J = RS485 1K = RS485 2Y = Ethernet 1Z = Ethernet 2L = CC-Link 1N = CC-Link 2I = EtherCAT 1X = EtherCAT 2S = w/o (VC only)DesignationOrdering software including service cable 3)600SV-99 LBCPA software including service cable 3)600SP-99 LBService box 2 (standard version with m cable) 3)601BS-29 NNControl panel for installation into 19" rack, including 5 m cable 3)602BS-29 LEConnector kit for valves with RS232, RS422, RS485 or Logic interface consisting of counter plugs for INTERFACE, SENSOR and POWER connections242411 Connector kit for valves with fieldbus consisting of counter plugs for SENSOR and POWER connections242410AC power supply unit (input: 100 - 240 V AC, output.

3 24 V DC / 4 A)249775 Separation unit for controller including 2 m cable2555443) Details see chapter Pressure controller optional controller configurationsSPS = 15V DC Sensor Power SupplyPFO = Power Failure Option ( valve closes or opens auto- matically at power failure)VC = valve Cluster Option (controller for operating several valves synchronously)G = basic versionA = with SPSH = with PFOC = with SPS and PFOT = basic version with VCV = with SPS and VCU = with PFO and VCW = with SPS, PFO and VC1) interface 2) qty. of sensors110K12 VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30 valve control systemSeries 65 FunctionFeaturesControl rangeVAT provides the control valve EVALUATION TOOL to help you select the product most suitable for your process.

4 The tool is available on our website Country control valve Evaluation Tool for free materialsPlate: FKM (VITON)Body: FKM (VITON)Bonnet: FKM (VITON) FeedthroughRotary feedthrough (actuator) FKM (VITON)Shaft feedthrough (sealing ring) FKM (VITON)The valve plate acts, due to its Pendulum motion, as a throttling element and varies the conductance of the valve opening. The integrated controller calculates the required plate position to achieve the setpoint pressure. See also principle drawing on page 225. Actuation is performed by a stepper motor.

5 An encoder monitors the position. This principle ensures fast and accurate process pressure leaktight closing the sealing ring moves downwards. It is closed by a spring. For opening the sealing ring is lifted pneumatically. Fast operation Extremely short control response times Position indication Integrated controller (easy to remove) Easy maintenance Service port (computer or service box 2 connection)sealing ringpendulum platependulum platesealing ringcontrolisolation1 Pendulum plate 4 bonnet seal 8 seal: shaft feedthrough2 sealing ring 5 actuator shaft 9 seal: rotary feedthrough 3a plate seal 6 actuator 10 seal.

6 Piston ring3b body seal 7 controller valve seat side111 VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30 K12 Series 65 BTechnical dataActuator unit with controllerValve unit Pressure range 1) - blank / hard anodized 1 10-8 / 1 10-6 mbar to bar (abs)Leak rate to the outside 1) - blank / hard anodized 1 10-9 / 1 10-5 mbar ls-1 Leak rate at the seat 1) - blank / hard anodized 1 10-9 / 1 10-4 mbar ls-1 Cycles until first service 2) - Throttling cycles 1 million (open - max. throttling - open) - Closing cycles 200 000 (open - closed - open)Operating temperature 3) 10 C - 120 CMounting position - DN 100 - 250 any 4) - DN 320 - 400 horizontal only 4)Material in vacuum - valve body EN AW-6082 ( ) - Pendulum plate EN AW-6082 ( ) - Sealing ring EN AW-6082 ( ), AISI 305 ( ), AISI 420C ( ), AISI 631 ( ) - Other parts AISI 316L ( , ), AISI 440 ( ), AISI 301 ( ), AISI 316 Ti ( ), AISI 304 ( ) - Seals FKM (VITON)Power consumption + 24 V DC ( 10%) @ V pk-pk max.

7 50 W max. (controller + motor) 10 W max. for Power Failure Option 36 W max. for Sensor Power SupplySensor supply 24 V DC or 15 V DCSensor input - Signal voltage 0 - 10 V DC linear with pressure - Input resistance Ri = 100k - Resolution mV - Sampling rate 10 msControl accuracy of maximum sensor rangePosition resolution 9155 (depending on nominal diameter)Ambient temperature 50 C max. (<35 C recommended)1) Unheated on delivery2) Unheated and under clean conditions / FKM (VITON)3) Maximum values: depending on operating conditions and sealing materials4) valve seat on chamber side recommendedDN (nominal I.

8 D.)conductance in open position (molecular flow)minimum controllable conductance (molecular flow)max. differential pressure in closed positionmax. differential pressure during operationcompressed air pressure min. - max. (overpressure)typical closing / opening timeweight (approx.)throttling onlythrottling and closingmminchls-1ls-1mbarmbarbarpsisskgl bs 100 4 1 700 31 200 304 - 755 - 100 / 4 12 160 6 5 000 51 200 104 - 755 - 100 / 4 18 40 200 8 12 000 101 200 54 - 755 - 100 / 4 22 250 10 22 000 151 200 54 - 755 - 100 / 4 29 64 320 12 30 000 221 200 54 - 755 - 100 / 6 48 106 350 14 43 000 251 200 54 - 755 - 100 / 6 59 130 400 16 61 000 301 200 54 - 755 - 100 / 6 68 150112K12 VAT Vakuumventile AG, CH-9469 Haag.

9 Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30 valve control systemSeries 65 DeviceNet Ethernetbus modulePressure controllerRS232, Logic, RS422, RS485 Electrical connectionsFeatures - Fast and accurate pressure control - Automatic learning of system parameters- Hold function for plasma ignition- valve position control - Remote control - Information display- Inputs for 1 or 2 linear pressure sensors (capacitance manometers)- Service interface for local operation- Closing or opening of the valve at power failure (option)Pressure control The controller ensures fast and accurate pressure control .

10 By operating the LEARN function needs to be done only once at start-up the system parameters are automatically determined. Due to the adaptive algorithm the controller continuously adapts to the process conditions (species of gas, gas flow) and thus ensures optimum pressure control at any position control In position control mode the valve plate can be moved to any Status and position are displayed by means of 4 bright control The valve can be controlled by a host computer via RS232, RS422, RS485, Logic, DeviceNet , Ethernet, Profibus, CC Link or EtherCAT interface.