「購入装置 QA 項目 ... - jeita-smtj.com

1 QA QA [ QA ] Version [ ] QA QA 2007 Selete iTable of Contents 1.. 1 .. 1 .. 2.. 3.. QA .. QA .. QA .. 4.. QA .. 5.. 6.. 7.. 8.. List of Tables 3-1 .. 357810 3-2 .. 3-3 2 .. 3-4 QA .. 5-1 .. List of Figures 1-1 QA .. 1 1 QA 2 QA QA QA 2007 Selete ii 3 QA 4 QA QA QA 2007 Selete 1.

2 Selete 2006 EES-WG EES EEQA QA EES 1) jeita /Selete QA 1-1 EEQA EEQA z EEQA z 1) z 1-1 1) QA 1 QA QA 2007 Selete 1-1 1)

3 QA QA QA QA QA Selete EES-WG QA QA QA QA QA QA EES-WG QA QA QA 2. 3 QA QA 1 QA 2 QA QA 3 QA QA 2007 Selete 3 QA QA 4 3.

4 3-1 3-1 1. 2. Furnace Anneal Oxidation LP-CVD Sinter etc. 3. RTP 4. CVD LP-CVD 5. PVD 6. Dry Etch Asher 7. Wet 8. Wet 9. CMP 10. 11. Coater/Developer 12. Scanner Stepper 13. 14. Back Grind 15. 16. 17. AMHS QA QA 1) 7 3-2 QA QA 1) 3-2 QA QA QA 2007 Selete 4 3-2 1 3-2 QA a) b) c) QA d)

5 QA b) c) d) QA QA QA 2007 Selete 3-2 FOUP

6 QA QA QA 1) 7 5 QA QA 2007 Selete 6 3-1 NO1~12 1 3-3 2 QA QA 2007 Selete 3-3 7 QA QA 2007 Selete QA QA 3-2 QA

7 EES-WG 3-4 QA QA QA QA 3-4 QA 4. 3-3 8 QA QA 2007 Selete 9 QA QA z QA QA QA QA z QA QA QA

8 QA z QA QA z QA QA 5. QA QA QA 2007 Selete z z z z QA z z z z z FMEA z 5-1 4 3 5-1 10

9 QA QA 2007 Selete 11 6. z QA QA QA z QA QA z QA QA jeita QA QA 7. 1 QA 2 QA 3 QA 4 QA 8. 1) jeita /Selete QA (2004/3) URL: QA EES-WG FOUP

10 1 / 17 QA EES-WG FURNACE FOUP FOUP L/UL 2 / 17 QA EES-WG RTP FOUP RF RF 3 / 17 QA EES-WG PCVD FOUP