RF GENERATOR REPAIR EXPERIENCE - apmkr.com

1 MKS Spectrum (B-11002-01)RF Plasma ~ MhzRF GeneratorRF GENERATOR REPAIR EXPERIENCEMakENIENIENIENIMODELOEM-6 SERISEOEM-12B SERISEOEM-1250,2000 SERISESPECTRUM11002,10513 SERISEENI MODEL REPAIR MakENIENIENIENIMODELOEM-25 SERISEPL2-HF SERISEACG-3B SERISEOEM-25XL SERISEMakENIENIENIENIMODELOEM-28 SERISEOEM-50 SERISEGMW25 GHW 50 SERISENOVA-50 SERISEMakAEAEAEAEMODELPDX-900 SERISERFG-1250 HALORFG-1250 , 2000-2V ,3000 RFG-5500 SERISERFDS-1250 SERISEATLAS2012 SERISEPDX8000 SERISEVHF2060 SERISEMakAEAEAE RFPPAE RPPMODELRFX II 3000 SERISEHFV-8000 SERISELF-5,10,20,30 SERISERF-5,10,20,30,50 SERISEMakAEAEAEAEMODELOVATION SERISEAPEX1513 APEX3013 APEX5513 MakCOMDELCOMDELCOMDELCOMDELMODELCLF-5000 CPS-1000, 1001S SERISECLX-600 SERISECDX-2000 SERISEMakDAIHENDAIHENDAIHENDAIHENMODELMG A20SA SERISEDRFS-5SA SERISEMFG15SA SERISEDRF10SB SERISEMFG20SA3 SERISEWGA30 SERISEMakLCD AE RFPP LCD AD-TECLCD KYOSANMODELRFPP 20R,30S,50S SERISEAX-7500,10000 SERISERFK-20,30,50,100 SERISEMATCHING BOX REPAIREXPERIENCEMakAMATAMATAMATAMATMODEL VECTRA MATCHER SERISEP-5000P-5000P-50000010-13622 0010-09416 (POLY)0010-09750 (CVD)0010-20524 (PVD)MakAMATAMATAMATAMATMODELP-5000P-500 0P-50000010-30686(HE ,MXP) SERISE0010-30094 (METAL)0010-36162 (OXIDE)0010-36408 (DPS)0010-13621(HE,PVD)

2 MakTRAZERTRAZERTRAZERTRAZERMODELTRAZER AMU2,5 SERISETRAZER SRN1-2 SERISETRAZER AMU SERISETRAZER AMU10 SERISEMakMATTSONMATTSONAE DRESSLER AE DRESSLER MODELRFS-1000 SERISERFS- SERISEVM 1000A SERISEVM 1500AW SERISERFS-2502 SERISERFS-3019 SERISEMakENIENIENIENIMODELMWD-25 SERISEMWM-25 SERISEMW-5 SERISEMWH-5 SERISEMakKYOSANPSCSIDE MATCHERPEARLMODEL30 TE12 SERISEPSC SERISESIDE MATCHERM-30AW2VD SERISEMakADTECLAMLAMLAMMODELAMV2000S SERISETOP MATCHMINI MATCHDSQ MATCHMakDAIHENDAIHENASTECHLCD DAIHEN / KYOSANMODELMGM-20SA SERISERMA-40A SERISEATL-100 DAIHEN RMN-30D2,50B,75A SERISERMN SERISEKYOSAN MBK-30,100 SERISERPS REPAIR EXPERIENCEAX7670 3 LAX7651-2FI20620-12 LFI801316 LAX7645 RPSFlowMKS P/N FI20620-1 AX76573L AX76704L FI80130 FI80131 FI80133 AX76808L FI8013215L FI8014622L AX7635-02 ASTRON hf ASTRON hf+ ASTRON e ASTRON ex6L ASTRON exModel ASTRON2L ASTRON iAX7651-2 = FI20620-1 REPAIREMENT SERVICEFAIL BOARDREPLACE andREPAIRPLASMA GAS BLOCK CHANGE Consumable Parts ReplacementPlasma Block, FFKM O-ring, Ceramic Center Ring, Thermal Conducting, Power MOSFET PCB REPAIR .

3 Function Test:Ignition Test, Burn-In Test, Power Range Testparticle test, block leak test Warranty:3month AE RAPID 6KW SERISET echnologyRPS REPAIR SYSTEMREPAIR TEST SYSTEMG ettingComponentsIgnition Waveform Test1. Test the ignition waveform2. Ignition waveformVp-p:300V Frequency:400 KSemiconductor 200mmPART SOURCINGS emiconductor 200mmDescription : Upper Chamber DPSM aterial : AL + AnodizingDescription : Chamber liner (MXP, SUPER-E)Material : AL + AnodizingDescription : Gate Door Ass yMaterial : AL + AnodizingSemiconductor 300mm AMAT PartsDPS MetalCathode Liner0021-13612 DPS OPUSC athode Liner0040-08152 EMAX CT+ Producer Mesh0040-85138 PolyCathode Liner0021-13430 DPS Poly Lower Chamber Liner0040-43977 DPS PolyScreen0021-13434 EMAX CT+Insulator External 0021-26626 EMAX CT+SGD Inner Cooling 0040-79926 DPS MetalUpper Chamber0040-88340 DPS PolySlit V/v Liner0020-63668 DPS PolySlit V/v Liner0040-81165 DPS MetalSlit V/v CT+ Slit Door Liner0020-52965 EMAX CT+SGD Outer Cooling 0040-79927 DPS PolyUpper Chamber0040-43978 DPS Metal Lower Chamber Liner0040-81155 DPS OPUSL ower Liner0021-42764 ProducerSlit Door liner (Right)0040-99549 liner (Left)

4 0040-99548 liner Sleeve0021-27015 ACPACP Door Valve0021-31804 300mm PartsSCCM SPPlate Shield3D10-101187-13 SCCM SPPlate Exhaust3D10-100845-11 SCCM SPRing BTM Shield3D10-100844-11 SCCM SPShutter BTM Type3D10-101152-13 SCCM SPShield Depo3D10-101194-12 SCCM SPDepo Window3D10-302734-12 NOVELLUSS hower Head15-176142-00 NOVELLUSS hower Head15-167054-002300 EXELAN FLEXC hamber Liner715-030860-0012300 EXELAN VERSYSC hamber Liner715-801021-0122300 Chamber Liner715-801021-8012300 Chamber Liner715-801021-8382300 Chamber Liner715-801021-8392300AL EXELAN FLEX 45 Plate Rocker Barrier715-802381-1042300 EXELAN FLEX 45 Plate Rocker Barrier715-802381-002 LAMEXT, AL Slotted715-045264-2422300 Hot Edge Ring715-443178-300