日本の装置設計技術者に ... - Salus Engineering

1 Engineering of Safe and Secure Society Series 1 SEMI Semiconductor Equi-pment and Materials International SEMI S2 1 Salus Engineering International 2 8 CE 3 SEMI S2 2 3 SEMI S2 SEMI S2 Policy of Safety for Manufacturing Equipment Designer in Japan Nishikawa Juhachiro SEMI S2 The view of the current

2 Policy of safety for the manufacturing equipment design and the design techniques of the equipment in Japan are explained for the designer. They are on the basis of the experience as the safety product engineer of SEMI Semiconductor Equipment and Materials International S2, which is Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. SEMI S2 1 Review Evaluation Audit 2 Salus Earth Tech Microelec-tronics iec60204 -33 SEMI S2 3 IPEJ Journal SEMI S2 1991 1993 SEMI S2 SEMI SEMI S2 1

3 1 2 3 LOTO 4 SEMI S2 SEMI S22 iec60204 -33 SEMI S22 1 SEMI S2 NRTL Notified body PSE SEMI S2 SEMI S2 PSE 3 AC30 Vrms V peak DC60 V 240 VA EMO 2 A 4 LOTO lockout/tagout 1 125

4 186 W 3 SEMI S2 SEMI S6 Hazard Process Material HPM HPM 2 HPM HPM OSHA/ACGIH 25 25 SF6

5 SEMI S6 SF6 HPM SF6 HPMHPM 2 SEMI S6 IPEJ Journal SEMI S6 SF6 SEMI S2 SEMI S8 SEMI S2 SEMI S8 a) b NIOSH 3 4 SEMI S2

6 1 SEMI S2-03102 iec60204 -333 NFPA79-20074 Basic Electrical Training of Salus Engineer-ing International in 20105 Gas box basis of Salus Engineering Interna-tional in 20076 Ergo Filed Notes of Salus Engineering In-ternational in 2007 Use the 1991 NIOSH Lift Equation for two hand, single-person lifts, and when no awkward postures. Salus Engineering International LOTO e-mail 3 NIOSH