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1 2011 5 17 2 2301 2. (: ) m FineCeramics 3. ex.
2 Si ( ) pore : Si [ 1 ]Si 100k ( ) Si ( 1 1 100ppm ) 1 ( 10 1 ) p 3 ( B ) 1 n 5 ( P ) 1 (a) p (b) n 1 Si ( = 1412 C) Si Si [ CZ ] 300mm ( grain ) : ( ) ( grain boundary ).
3 ( ) ( mobility ) Czochralski 12 20 ~10 Si - Si Crystal Growth