STATIONworks Technical Brief - …

1 STATION works Technical BriefNovember 1999 STATION works Version FASTech MES ProductPreliminaryThis document contains information that is the property of Brooks Automation, Inc., Chelmsford, MA 01842, and is furnishedfor the sole purpose of the operation and the maintenance of FASTech products of Brooks Automation, Inc. No part of thispublication is to be used for any other purpose, and is not to be reproduced, copied, disclosed, transmitted, stored in a retrievalsystem, or translated into any human or computer language, in any form, by any means, in whole or in part, without the priorexpress written consent of Brooks Automation, byBrooks Automation, Elizabeth Drive / Chelmsford, Massachusetts 01248 / USA(978) 262-2400 FAX (978) 262-2500 OR 1999 by Brooks Automation, Inc. All rights at Brooks Automation, Inc.

2 , we make every effort to ensure the accuracy of our documentation, Brooks assumes no responsibilityfor any errors that may appear in this document. The information in this document is subject to change without code that appears in documentation is included for illustration only and is, therefore, unsupported. This software is provided free of chargeandis not warranted by Brooks in any way. FASTech Products Technical Support will accept notification of problems in sample applications, but Brookswill make no guarantee to fix the problem in current or future s CELLman, CELL talk,CELL guide, Grapheq,WINclient, TOM, STATIONS works, and FASTspc are trademarks of Brooks Automation, , FASTech s CELL works and FACTORY works are registered trademarks of Brooks Automation, Reader is a trademark of Adobe Systems , ObjectCenter, and TestCenter are trademarks of UNIX is a trademark of Digital Equipment is a trademark of Hewlett-PackardHP-UX and Glance are trademarks of Hewlett-Packard is a trademark of Ingres , ORACLE 7, SQL*Net, and SQL*Plus are registered trademarks of Oracle is a trademark of Open Software Foundation, is a trademark of Computer Associates International.

3 Is a registered trademark of Adobe Systems, , Quantify, PureCover are trademarks of Pure SoftwareSeagate Crystal Reports and Seagate Crystal Info are trademarks or registered trademarks of Seagate Technology, Inc. or one of its subsidiariesSEMI is a trademark of Semiconductor Equipment and Materials is a trademark of Sun Microsystems, , UltraSPARC, and all other SPARC trademarks are registered trademarks of SPARC International, is a trademark of Sun Microsystems, is a trademark of Sybase, V and SVID (System V Interface Definition) are trademarks of American Telephone and Telegraph is a trademark of Teknekron Software Systems, ++ and ++ are trademarks of RogueWave Software, is a registered trademark of X/Open Company, and Visio are registered trademarks of Visio NT, Active X, and Visual Basic are trademarks of Microsoft is a trademark of Consilium, Window system is a trademark of the Massachusetts Institute of is a trademark of Mercury other product names referenced are believed to be the registered trademarks of their respective Technical BriefTable of ContentsChapter 1 How to Deploy STATION works?

4 Purpose of STATION works Systems .. 1-2 Who Uses STATION works? .. 1-2 STATION works System Components .. 1-3 STATION works Development 1-4 STATION works Configuration/Deployment Components .. 1-6 How STATION works Components Work 1-8 What Files Does the STATION works System Use? .. 1-11 Developing Tool Driver 1-12 Developing State Machines .. 1-14 Assigning State Machines to Equipment .. 1-17 Checking Tools/State Machines into SourceSafe .. 1-17 Configuring Station with 1-18 Rolling Out Stations to Production File Store .. 1-21 Starting/Monitoring the Station .. 1-22 Chapter 2 Why a State Machine and Services?Why a State Machine to Manage Equipment?.. 2-2 Product Evolution .. 2-2 What Are the Advantages of a State Machine? .. 2-3 Resolving Flow Issues with State Machine .. 2-5 How Do State Machines Model Equipment?

5 2-6 Using State Machine Equipment Managers with an MES .. 2-8 MES Services Link the MES to Equipment .. 2-10 Using Services to Connect to Equipment, Take Other Actions .. 2-11 Chapter 3 Other Elements of STATION worksWhat Is the Role of WinSECS? .. 3-2 What Are TOM Applications? .. 3-2 Using TOM Explorer as Debugger .. 3-3 INFO1-1 STATION works Technical BriefHow to Deploy STATION works1 Topics in This ChapterThis chapter presents all the components of STATION works,describing how you put them together in a development environment,then deploy them on the manufacturing shop of STATION works Systems, p. 1-2 Who Uses STATION works?, p. 1-2 STATION works Development Components, p. 1-4 STATION works Configuration/Deployment Components, p. 1-6 How STATION works Components Work Together, p. 1-8 Developing Tool Driver Database, p.

6 1-12 Developing State Machines, p. 1-14 Assigning State Machines to Equipment, p. 1-17 Checking Tools/State Machines into SourceSafe, p. 1-17 Rolling Out Stations to Production File Store, p. 1-20 Configuring Station with SwConfig, p. 1-18 Starting/Monitoring the Station, p. 1-21 NOTEThis document is subject to change without notice. Itpresents features planned for an upcoming release, butit is not a guarantee of availability of those features byany particular of STATION works SystemsHow to Deploy STATION works1-2 Brooks AutomationPurpose of STATION works SystemsSTATION works systems are designed to develop and deploy stationcontrollers/equipment managers in manufacturing STATION works, you can startup up, monitor, and stop multipleProduction Stations on multiple PCs, each operating various pieces system is made up of Stations that:nAutomate multiple pieces of communication between that equipment and the an interface to the equipment for operators on the Uses STATION works?

7 Several players in the manufacturing scenario use STATION works:nStation Controller Developers Design and develop Stationcontrollers/equipment managers in state machine Administrators Determine which Production Stations willrun particular pieces of equipment from particular PCs. Ensure thatSTATION works systems can start, stop, and be Engineers Roll out new development logic into theproduction environment. Actually start, stop, and manage theequipment at manufacturing time using a STATION works. Evaluatethe equipment utilitzation and manufacturing Interact with STATION works applications created bythe s take a closer look at the components of System ComponentsHow to Deploy STATION works1-3 STATION works Technical BriefSTATION works System ComponentsWhat are the components that make up a STATION works system?DevelopmentComponentsSTATION works development components are:nSwIDE (this component uses the SwMonitor)nTOM BuildernTOM Explorer (as a debugger)nVisual Basic (Microsoft product)Configuration andDeploymentComponentsSTATION works configuration and deployment components are:nSwConfignSwRunnTOM DB BrowserSTATION works Development ComponentsHow to Deploy STATION works1-4 Brooks AutomationSTATION works Development ComponentsLet s first look at those intended for the STATION works developers:nSTATION works IDE (SwIDE) The STATION works IntegratedDevelopment Environment.

8 For developing state machines (.fsmfiles) on developer workstations. Through the IDE you can use theSTATION works Monitor (SwMonitor) to run/test state machineswhile developing them and display .fsmdiagnostic messages. Whenthe developer creates a Station Template, the IDE creates a Stationfile (.sta) that contains that Station definition; this .sta file StationTemplate becomes the basis for one or more Configuration Stations,which you later roll out into Production Stations for Builder (TomBuilder) For developing tool databases ordeveloping custom drivers on developer s Explorer (texplore) You can use the TOM Explorer todebug your Visual Basic Template (.sta)Configuration Stations (.sta)Production Stations (.sta)with Attributeand ParameterSettingsRoll outSTATION works Development ComponentsHow to Deploy STATION works1-5 STATION works Technical BriefnVisual Basic(Microsoft product) For developing STATION worksTOM Services or VBScript actions used in the state of STATION works Developer ComponentsDeveloper workstation withVisual Basic,STATION works IDE,TOM Builder,SourceSafe (optional)Storage and Version ControlStation Data RepositorySourceSafe Server (not requiredbut strongly recommended)STATION works Configuration/Deployment ComponentsHow to Deploy STATION works1-6 Brooks AutomationSTATION works Configuration/Deployment ComponentsAs part of preparing to deploy the applications, CIM engineers need tomodify any TOM Attributes or state machine parameters as requiredbefore running the Production Station.

9 NSTATION works Configuration Manager(SwConfig) A centralworkstation that the CIM engineer uses to modify the configurationof a particular Configuration Station (.sta file) or group ofConfiguration This element of the product runs the state machine anddisplays log messages in a very simple GUI. It lets you run, pause,and stop state of STATION works Configuration and Deployment ComponentsDisk with Station Data RepositoryMay or may not be aProduction Fileson Shared DiskManufacturing Workstationswith (Production File Store)Each has a local file store that contains required .fsm, .mdb, and .sta files. SourceSafe Server (Not required, but strongly recommended)with SwConfigand SourceSafe(optional)STATION works Configuration/Deployment ComponentsHow to Deploy STATION works1-7 STATION works Technical BriefnTOM DB Browser This browser lets you view the Tools in thedatabase at any time.

10 Using this brower, you can quickly look at theTool s Services, Attribute settings, and other STATION works Components Work TogetherHow to Deploy STATION works1-8 Brooks AutomationHow STATION works Components Work TogetherHow do these components work together?Let s Look at the Development ToolDatabaseFirst, the developer develops a Tool database using TOM Builder. Thatdatabase may include Tools provided with the product, custom Tooldrivers, or drivers that are modifications of those provided withcustom attribute settings to apply to a particular piece of StateMachinesOnce the Tool database is established, the Station developer can createa state machine that uses a particular Tool in the database or a generictype of Tool, such as an ellipsometer or lot sorter. State machines thatare designed to use a generic Tool can use any Tool of that type at StateMachines toEquipmentThe Station developer or CIM engineer next designates the piece (orpieces) of equipment that a particular Tool driver and state machinewill run.