Technical Report UDC 669 . 14 . 018 . 8 …

1 NIPPON steel & SUMITOMO METAL Technical Report No. 106 JULY 2014-82-1. IntroductionAustenitic stainless steel sheets provide high mechanical proper-ties through cold rolling, and are therefore used for mechanical and electronic parts of precision machinery in automobiles and consum-er electrical , 2) To respond to the recent trend toward further miniaturization and sophistication in apparatus performance, stainless steel must now offer more sophisticated functions to meet steel & Sumitomo Metal Corporation produces SUS 304 H-SR (hereinafter 304 H-SR ), SUS 304 H-SR2 ( 304 H-SR2 ) and NSSMC-NAR-301L SE1 ( 301L SE1 ).

2 304 H-SR is a stainless steel developed for precision cutting, including photo-etching and laser processing. It is based on an austenitic stainless steel used as a thin sheet spring material of mm or below in thickness. The develop-ment of 304 H-SR2 and 301L SE1 was based on the production tech-nology for 304 H-SR; precision-cutting performance of them was en-hanced by refining the crystal grains of the mother material. This ar-ticle introduces the characteristics of austenitic stainless steel for pre-cision cutting and the Technical background guiding the development of the steel , focusing mainly on crystal grain refining Precision Cutting Photo-etching and laser processThe photo-etching process and laser process discussed in this ar-ticle are considered as typical examples of precision-cutting , 4)

3 They process stainless steel sheets into desired product shapes by removing unnecessary portions through chemical dissolu-tion or photo-etching process for metallic material utilizes printing and corroding technology. It is widely used to produce the following parts: metallic parts with high dimensional accuracy; complicated figures such as precision machinery parts; precision electronics and optical apparatus parts; and decoration parts or ornaments. In the photo-etching process, desired product figures are obtained by print-ing the product figure pattern on the subject metallic material sur-face with a photo-sensitive resin (Photoresist), and then by making the exposed metallic portion dissolve selectively into a corrosive chemical solution such as ferric chlorides.

4 This process results in a product that is free from burrs, strains, material deformation and work hardening, enabling precision cutting where dimensional ac-curacy in the micro-millimeter order is required. Also, since costly dies are unnecessary, the process is capable of meeting various pro-duction requirements, from small-lot trials to extensive mass pro-duction. It is also capable of etching both surfaces (perforating holes, as well as holes having different diameters on the two surfaces), and processing products that have complicated sectional shapes (by combining half etching of either surface with stepped etching).

5 Laser processing is a fusion-melting method used to remove un- Technical Report UDC 669 . 14 . 018 . 8* Researcher, Titanium & Specialty stainless steel Research Lab., steel Research Laboratories 1-8 Fuso-cho, Amagasaki City, Hyogo Pref. 660-0891 Development of austenitic stainless steel Sheets for Micro-FabricationMasayoshi SAWADA* Hayato KITAM asayuki SHIBUYA Kazuyoshi FUJISAWAA bstractAustenitic stainless steels 304 H-SR , 304 H-SR2 and 301L SE1 were developed for microfabrications like photoetching and laser processing. 304 H-SR and 304 H-SR2 have superior flatness, low residual stress and improved surface wettability, which are re-quired as the materials for microfabrications.

6 These high performances are attained mainly by Tension Leveling (T/L) process, Stress Relieving (S/R) process and Special Surface Treat-ment. 301L SE1 with fine grained structure has been received high reputations as a mate-rial with excellent smoothness of the fabricated surface, in addition to the above mentioned characteristics. The grain refinement has been achieved through the use of ' reverse transformation and pining effects by minute precipitates with optimization of the alloy com-position and manufacturing steel & SUMITOMO METAL Technical Report No. 106 JULY 2014-83-necessary portions by radiating a laser beam directly onto the sur-face of metallic materials that are to be processed in accordance with a CAD design drawing.

7 Laser processing is capable of process-ing products having a density higher than those processed by photo-etching, and has a readiness to comply with the small lot production of many products. One example where laser processing is applied is the metal mask ( Stencil ) for printing solder paste on a print circuit ) The metal mask is made from a stainless sheet of - mm in thickness on which a circuit pattern has been printed and cut off. Conventionally, the photo-etching process is used for cutting; however, laser-processed metal masks are increasing in number to meet the requirements of printed circuit boards growing higher in density.

8 Metal masks having more sophisticated functions have also been developed for practical use. They have sectional fig-ures processed by a controlled combined application of the etching and laser processes, and vertical laser-processed sections. Small, thin electronic devices like smartphones and tablet PCs are rapidly become common in recent years, and to meet the demand for higher circuit density, processing that provides even higher precision is be-ing sought. Also in demand are materials that offer higher perfor-mance, and further developments in the processing Characteristics required for material using in precision cuttingHigh sheet thickness accuracy and flatness are required for pho-to-etching, in order to secure stabilized line threading behavior and accuracy of luminous pattern exposure.

9 Residual stress minimiza-tion inside the material is also necessary to suppress twisting, cam-ber and dimension change from expansion or contraction, and defor-mation after etching processing. Furthermore, to secure good adhe-sion for the photoresist, the material is also required to have excel-lent wettability. Product density is tending to increase considerably, and now greater attention is being paid to the sharpness of etching-processed edge surfaces and the smoothness of etching-processed laser processing, the material is installed on a frame and set in a laser processing system.

10 Therefore, if the material has poor flat-ness the distance between the laser head and the material surface will be uneven, and the desired finishing accuracy cannot be ob-tained. Also, deformation due to local heat during fusion-melting by laser occasionally becomes problematic. Accordingly, precise flat-ness, low residual stress, and high smoothness of processed surfaces are required for laser processing. These material criteria are similar for the photo-etching stainless steel Sheets for Precision CuttingNaoetsu Works, a division of Nippon steel & Sumitomo Metal, is working on the improvement of processing technologies and en-hancing the quality of stainless steel material appropriate for above-mentioned precision cutting, such as the photo-etching and laser processes.