Ultra High Purity Valves

1 Ultra high Purity ValvesHBA1000 SeriesULTRA- high Purity AND high PERFORMANCE PNEUMATICALLYOPERATED BELLOWS Valves FOR BULK GAS DISTRIBUTION AND GAS CABINETS>>>>Product Features Vacuum to 250 PSIG working pressure 100% Helium leak tested for high leak integrity and containment Visual indication for valve position status 100% DI-Water cleaned for Ultra -cleanliness Supports high flow media distribution securely and safely Supports automated control in bulk gas, process gas cabinets & valve manifold boxes Optimal flow and optimal life cyclePro V 10in ViV 100 100 Su Sse se se Supro Op Carten Controls Ltd is a member of the Fujikin high Purity ValvesProduct Features Carten HBA1000 SeriesThe Carten HBA1000 series is a pneumatically actuated bellows valve designed for bulk gas distribution and valve manifold boxes in high Purity gas and solvent systems where large flows are required to support user demands in the facility.

2 The Carten design HBA1000 pneumatic actuated valve model is suitable for inert gases, most toxic gases and most solvents delivering performance, containment and cleanliness for the process media. The unique pneumatic actuator has an innovative visual open/close indicator providing the user with a visible signal when the valve is in an opened or closed position. The unique bellows valve design enables the HBA1000 to achieve superior flows at low to medium operating pressures under a variety of system temperatures in the ever-challenging demands of the high technology Applications Include: Ultra - high Purity process gases Ultra - high Purity bulk gas delivery systems Ultra - high Purity solvent systems Process gas cabinets Valve manifold boxes (VMB) and valve manifold panels (VMP) Automated isolation control in filter stations Automated isolation control in purifier systems Ultra - high Purity gas supply in tank farm and gas yard installationsHBA Actuated Top Works Open/Close Visual Indicator Nickel foil seal PneumaticAir ConnectorHBA1000 Series Key Performance Data * No failure.

3 Maintains Inboard 1 10-9 atm scc/sec containment, and outboard/across-the-seat helium leak rate (inch) 11 Carten ModelHBA751 seriesHBA1000 seriesHBA1501 seriesInlet Pressure(psig)Vacuum to250psigCv Rate(atm cc/sec)1 x 10-9 Cycle Life150,000 Cycles@ 250psig; 20 C* Grades10Ra EP (std)5Ra EP20Ra EP PCTFE Seat Insert Electropolished 316L Barstock Body INLET OUTLET 316L Bellows 316L Tube Stub Product SpecificationsFluid MediaThe HBA1000 series is suitable for most inert, explosive and corrosive gasses or those requiring high Purity media delivery and containment, which are compatible with materials of construction. For other media applications please consult with Carten group members.

4 Maximum Pressure Rating Maximum rated inlet pressure: 250psig (17 Bar) Design Proof Pressure: 150% of Maximum rated pressureMaterials of Construction Body: 316L Stainless Steel (Electropolished or BA) Seat: PCTFE (Vespel optional. Other seat materials optional) Bellows: 316Ti Stainless Steel Foil Seal: Nickel Seat Holder/Flange: 316L Stainless Steel Pneumatic Actuator: Aluminium UlUlUlUltrtrtrta a aHiHiHighghgh P PPurururititity y yVaVaValvlvlvesesesProduct Features Carten HBA1000 SeriesUHP high Performance Pneumatic Bellows ValveUltra high Purity ValvesUlUlUltrtrtra a a HiHiHighghgh P P Purururititity y y VaVaVValvlvlvlveseseesKey Performance Parameters Durable bellows valve design for Ultra - high Purity and superior flow Innovative actuator design with visual open/close indicator Compact and robust actuator design to fit in high Purity gas installations Pneumatic operation available in normally closed (NC) and normally open (NO) Capability to fit proximity sensors for PLC control purposes Broad pneumatic air supply range from 60-100 psi ( bar)

5 No internal particle shedding of components Superior leak rate of 1x10-9 scc/s Helium for body seal and PCTFE seat Assembled and tested in a class 10 cleanroom for cleanliness, Purity and containment Purge ports and purge Valves are integral to the valve body Electropolished wetted surface for superior corrosion resistance Individual serialisation of Valves for complete quality traceabilityProduct Selection and Ordering InformationProduct ExampleHBA 1000 065 1 FSM FM PV2 NC PSEx[SO] AR(1) Series (2) Connection Size (3) Inlet ConnectionHBA 751 = 065 = Tube Stub 1000 = 1 FSM M = Face Seal Metal Male 1501 = 1 (Cv ) FSM FM = Face Seal Metal Female 1 FSM M = 1 Face Seal Metal Male 1 FSM FM = 1 Face Seal Metal Female(4) Outlet Connection (5) Purge Connection (6) Actuator DesignatorNo designator if the same as inlet PC1 = Downstream purge NC = Normally Closed 065 = Tube Stub connection NO = Normally Opened FSM M = Face Seal Metal Male PC2 = Upstream and (air fail) FSM FM = Face Seal Metal Female Downstream purge connection1 FSM M = 1 Face Seal Metal Male PC3 = Upstream purge connection 1 FSM FM = 1 Face Seal Metal Female PV1 = Downstream purge valve No designator = Line Valve PV2 = Upstream and Downstream purge valve PV3 = Upstream purge valve (7) Proximity Sensor (optional) (8)

6 Accessories (optional)PS = proximity sensor AR = Air regulatorPSEx[SO] = explosion proof proximity SOL = solenoidsensor, signal open No designator if not requiredPSEx[SC] = explosion proof proximity sensor, signal close No designator if not requiredHBA 1000 1000 065 0651 FSM FM 1 FSM FPV2 PV2 NC NC PSEx[SO] PSEx[SO] AR87654321(1) Series (2) Connection Size (3) Inlet Connection(4) Outlet Connection (5) Purge Connection (6) Actuator Designator(7) Proximity Sensor (optional) (8) Accessories (optional)100 PSIG = Megapascals (MPa) Kilopascals (KPa)Pressure Conversion ReferenceConstructionMaterialMaximumOper atingPressureOrificeMaximumOperatingTemp eratureFlowCoefficient Cv)HeliumLeak TestWetted AreasNon-Wetted AreasHBA751 HBA1000 HBA1501 HBA751 HBA1000 HBA1501 PCTFE Seat Vespel SeatHBA751 HBA1000 HBA1501 Inboard/across the seatHelium leak test performed with 100% Helium316L , Nickel, PCTFE316L , 303 , Aluminum Vacuum to 250 PSI (17 Bar) ( ) ( ) ( ) min-30 C to +82 C (-22 F to +180 F)-30 C to +150 C (-22 F to +302 F) ** x 10-10 scc/s RatedHe max 1 x 10-9 scc/s StandardHe max ** ProductionCleanlinessStandard FinishAir SupplyAir ConnectorOptionsWeightAssembled and tested in a Class 10 cleanroom.

7 Purged and packaged in a Class 1 area. Double-bag packaging for containment. Cleaned in 18 DI water for O2 to 10Ra ( m) EP on all wetted psi ( bar) OD quick connector tubeMetric connections optional Optional surface finishes high temperature capability Manual operation Fitting of Ex proximity sensors Metric and ISO tube stubs Particle, moisture, THC and O2 testing Optional body materials in VIM/VAR ( )HBA1000-NC ( )HBA1501-NC ( )Product Features** Helium leak rate for vespel seated Valves is rated at 1 x 10-6 scc/s across the seat for pneumatically operated model.

8 Vespel is a registered trademark of DuPont Controls Ltd.,Unit 609, Industrial ParkWaterfordIrelandTel. +353-51-355 436 Fax +353-51-378 054E-mail: designed and produced by Emagine Media Controls, A Division of Fujikin of America, 604 West Johnson Avenue, Cheshire, CT. 06410, +1-203-699 2100 Fax +1-203-699 2109E-mail: Products By Carten Ultra - high Purity Bellows Valves Ultra - high Purity Diaphragm Valves Ultra - high Purity Regulators high Purity Check Valves high Purity Ball Valves Vacuum Generators Gas Sticks Gas PanelsCarten Controls Ltd is a member of the Fujikin Fujikin high Purity Valves