1 VOLATILE ORGANICS ANALYSIS . BY ATD GC-MS . What is ATD GC-MS ? ATD GC-MS (Automated Thermal Desorption Gas chromatography - mass spectrometry ) is a well-established technique and the industry's preferred testing method for speciation and semi-quantitation of VOLATILE ORGANICS APPLICATION 1. VOC in cleanroom 2. VOC in clean chamber/environment 3. VOC in CDA or other inert gasses 4. VOC in gas delivery system 5. VOC of critical tool components 6. VOC of cleanroom consumables and materials ANALYSIS of VOC in Cleanroom by ChemTrace Ambient Air VOC. Sampling Kit ChemTrace ambient air VOC sampler is equipped with Perkin Elmer Tenax GR packed tube engineered to trap C7- C30 chained ORGANICS in cleanroom air.
2 The trapped ORGANICS are analyzed by Automated Thermal Desorption Gas chromatography mass spectrometry . KIT INCLUDES: Perkin Elmer Tenax GR packed tubes Air pump Universal AC/DC Adaptor ANALYSIS of VOC in CDA, Inert Gasses, Gas Delivery System, Test Chamber This kit includes Swagelock nut with PTFE ferrule that provides connection to most gas lines. The sampling tube is packed with Perkin Elmer Tenax GR to trap C7- C30 chained ORGANICS from inside gas line. KIT INCLUDES: Perkin Elmer Tenax GR packed tubes Swagelock nut Metering valve (optional item). Flowmeter (optional item). ChemTrace. All rights reserved. 44050 Fremont Blvd Fremont, CA 94538 Phone: (510) 687-8000 ANALYSIS of Chamber Components/Cleanroom Materials by ATD GC-MS .
3 PREPARATION OF SAMPLE PRIOR TO SAMPLE SUBMISSION. To protect the sample integrity, package sample in 2 layers of Ultra High Vacuum (UHV) clean Aluminum foil to minimize VOC. contamination during transport 1 2 3. Coupon/part is heated in Organic compounds are Volatized organic sample desorber and VOLATILE desorbed off the compounds are separated ORGANICS are trapped by Tenax GR or Carbotrap and analyzed by GC-MS . Tenax GR or Carbotrap OUTGASSING CONDITION. IEST-RP-CC031: METHOD FOR CHARACTERIZING OUTGASSED ORGANIC COMPOUNDS FROM. CLEANROOM MATERIALS AND COMPONENTS. Baselining of tool components and cleanroom materials by Thermal Desorption Gas chromatography - mass spectrometry at 50 C.
4 (122 F), 75 C (167 F), 100 C (212 F), and 150 C (302 F). To inquire about our services, please contact us at ChemTrace. All rights reserved. 12130 NE Ainsworth Circle, Suite #210 Portland, OR 97220 Phone: (503) 254 - 2828.