WATLO W SEMICONDUCTOR PROCESSING

1 WATLOWTHERMALTECHNOLOGIES FORGLOBALINDUSTRYSEMICONDUCTORPROCESSING W atlow is the global leader in providinginnovative thermal solutions for semiconductorapplications ranging from crystal growth throughfront-end wafer process to back-end since the first diode, temperature has playedan important role in semiconductormanufacturing processes. Watlow was there atthe beginning and continues to provide provenresults to the industry s processes including in-situdeposition, etch and s solutions are based on anunderstanding of the SEMICONDUCTOR TechnologyRoadmap. As dimensions shrink, temperature asa critical process variable increases inOxidationChemical VaporDepositionDiffusionPhotolithography Plasma EtchIon ImplantationWet EtchCrystal PullingCrystal GrowthWAFERPROCESSING importance for equipment and processengineers.

2 Watlow meets the ongoing demandsof the industry and the thermal challenges ofnew SEMICONDUCTOR processes. We continue toinvest in R&D, global manufacturing andsourcing and introductions of new thermaltechnologies and better serve the SEMICONDUCTOR industry,Watlow has design, manufacturing, sales andtechnical support facilities in Asia, Europe andNorth America. We have developed new thermaltechnologies for deposition, dry and wet etch,photolithography, test and back-end a global company, we support internationaldesign guidelines and agency HandlingCleaningSputteringRapid ThermalProcessingWafer TestWaste TreatmentStripperPACKAGING,ASSEMBLY AND TESTGas Delivery and Pump Line Thermal SolutionsHigh Uniformity Gas Delivery Line Heaters.

3 2 STRETCH-TO-LENGTH Gas Delivery Line Heaters .. 3 SERIES EHG Controllers .. 4 Pump Line Heaters .. 5 Temperature Control Consoles .. 6 Table of ContentsDeposition and Etch Vacuum Chamber Thermal Management SolutionsTemperature Sensor Technologies .. 8 Large Thick Film Heater Panels ..12 Thick Film Heaters on Ceramic Substrates ..13 Wafer Chuck and Pedestal Assemblies ..14 High Performance Metal Sheath Heaters .. 16 Wet Process EquipmentThick Film Quartz Heater Modules .. 20 UNIVERSAL SOLVENT Heaters .. 21 STARFLOW Nitrogen (N2) Air Heaters ..22 RAPID RESPONSE Heat Exchangers ..23 VERSALINE 500 In-line Heaters ..24 Temperature Controllers and ConnectivityConnectivity Solutions.

4 26 Controller Products Connectivity Matrix .. 27 DIN-A-MITE Power Controllers .. 28 SERIES D8 Temperature Controllers ..28 SERIES PD Temperature Controllers ..29 SERIES SD Temperature Controllers ..29 SERIES SD Limit Controllers ..29 Controller Products Agency Compliance, Recognitions or Approvals ..30 Design ServicesSingle Iteration .. 31 Controlling temperature of gases delivered to a vacuum chamber and out the pump linesis essential as the industry develops newprocesses in alignment with the SemiconductorTechnology Roadmap. Platform based tools aredesigned to not only increase throughput, butalso increase the thermal managementchallenges involved with providing consistentdeposition and etch processes.

5 Yields increaseand preventative maintenance frequency candecrease when delivery and exhaust gases are controlled within the prescribed s gas and pump line heating systemswere developed to provide flexibility indesigning the optimum heating chamber plumbing systems cancreate a thermal challenge because of varying thermal mass, constricted spaces and last minute layout changes. The new STRETCH-TO-LENGTH heating system and SERIES EHG controllers are standard solutions for hard to heat gas delivery lines. Integrated as a complete package, Watlow componentsreduce design time and system costs. Solutionswith fast delivery for abatement applicationsare possible because Watlow has over onethousand standard heater configurations in ourdesign is a registered trademark ofUnderwriter s Laboratories, Gas Gas Delivery and Pump Line Thermal SolutionsA number of gases used in SEMICONDUCTOR wafer processingrequire uniform heating of the gas lines in order to preventcondensation and potential contamination of the waferprocess.

6 Condensation occurs at cold spots and may resultin expensive maintenance and tool down occurs when hot spots in the gas line causethe gases to break down and results in reduced 's High Uniformity Temperature Solution starts withthermal profiling the gas lines in order to understand thethermal gradients resulting from component mass, materialand physical orientation. The standard and custommodeled silicone rubber gas line heater solution results in athermal system that meets specification and is repeatablefor common tool and BenefitsEven heating to 200 C (392 F) for uniform temperatureprofiles over the entire heated line Helps eliminate condensation in lines and/or maintainprocess chemistry Insulated straight fillers for 100 percent line coverage(elbows and tees are trim-to-fit to proper length)

7 Cleanroom compatible silicone rubber construction Clean heaters will not contribute to particle generationEnvironmental safety Reducing particle buildup decreases potential ofemployee exposure to hazardous materials during normalcleaning cyclesOptional UL 94-VO flame retardant materials Fire-safe UL 94-HB or UL -VO materialApplicationsGas delivery lines Boron trichloride, BCI3 Chlorine trifluoride, CIF3 Dichlorosilane, (DCS), SiH2CI2 Tetraethylorthosilicate, TEOS Tungsten hexafluoride, WF3 Process gas line qualificationGas Gas Delivery and Pump Line Thermal Solutions - 3 Watlow s STRETCH-TO-LENGTH gas line heating system wasdeveloped as an easy-to-assemble temperature solutionwith performance superior to heat tape.

8 The flexibility ofthese heaters give engineers the ability to compensate forthe size of different components thus reducing the potentialfor hot and cold spots. Watlow s STRETCH-TO-LENGTH heaters are UL recognizedfor safety standards and are SEMI S2-93 compatiblewith a high limit thermocouple and Rubber Heater Specifications Heater and insulation jacket material: reinforced siliconerubber fabric Color: insulation and outer jacket, orange; heater, orange Clean room strap fasteners Voltage: 120 to 240V~(ac) Maximum operating temperature: 200 C (392 F) Watt density: W/cm2(2 W/in2) Watlow recommends80 percent line wrap for optimum performance Power lead wires: 305 mm (12 in.)

9 ; #16 AWG UL 1180 CSA,rated 13A, lead wire pair encapsulated in reinforcedsilicone rubber sleeving Heater interconnectable up to 13A circuit Material rated UL 94-HB Heater materials are UL rated to 200 C (392 F)Features and BenefitsEasy to install two part system Conveniently fits on most gas line configurationsFlexible heater design gives engineers the flexibility toeasily customize the thermal profile for each gas lineapplication Standard designs and stocked product allow quickprototyping to determine energy distribution requirementsfor process improvementsFlexible standard system components Eliminate unnecessary lead times for custom designs4 - Gas Gas Delivery and Pump Line Thermal SolutionsWatlow developed the SERIES EHG temperature controllerfor gas and pump line heater applications.

10 This new thermalsolution includes a compact temperature controller,thermocouple sensor and power switching device that areintegrated into the heater s power cord. The SERIES EHGreduces system costs and substantially extends the life overconventional thermostat and BenefitsLong operational life Improves system reliabilityTight temperature control Assures process accuracySmall sensor footprint Fits with almost any heater Responds quickly to temperature changes Controls high watt densities in low mass applicationsUL recognized Compliant with agency regulationsReduced system cost A single EHG controller can be configured with heaters toreduce system costPre-wired, in line control Simplifies installation Two wire power connectionDurable housing with built-in strain relief Protects electronics Low risk of mechanical damageLife comparison atTested to greater thanRated 100,000 cyclesLonger product life ofrated amperage4,000,000 cycles withSERIES EHG system and10 amp loadhigh reliability in applicationSwitch hysteresis3 C (6 F)8 C (15 F)SERIES EHG system will providesuperior process controlImproved response 3 C (6 F) typical14 C (25 F)