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1 181 2112089 1/3 2021 12 20 wsts 2021 2020 2022 SEAJ 2021 2022 2023 2021 2022 2022 2021 11 30 wsts 2021 2020 2022 2019 2017 5G 2021 2 SEAJ 10 11 2021 7 1 2022 2023 21/4 6 2 2022 5G 01,0002,0003,0004,0005,0006,000 wsts 05001,0001,5002,0002,5003,0003.

2 50015/116/117/118/119/120/121/1 3 / 181 2112089 2/3 21/7 9 2021 3 2022 4 6 7 9 2021 4 2021 5 2021 SoC 38 2020 30 14 12 2021 SoC 41 14 4063 2024 JSR 4185 ArF ( )

3 EUV 4186 EUV AGC 5201 EUV 25 50 6323 FPD TSMC 21/3 8 95 6857 21/7 9 4 6 6920 EUV 6951 HOYA 7741 EUV 8035 21/4 9 40 86 2 181 2112089 3/3 6 2 5 6 2 6

4 I ( ) 2,750 2,750 II 2,750 2,750 III