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Radiofrequency Plasma Sources for Semiconductor Processing

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1234567891011121314151617181920212223242 5262728293031323334353637383940414243444 5Druckfreigabe/approvalforprintingWithou tcorrections/`ohneKorrekturenAftercorrec tions/nachAusf hrung`derKorrekturenDate/Datum:......... ..........................Signature/Zeic hen:............................6Radiofr equency Plasma Sources for Semiconductor ProcessingFrancis F. the etching and deposition steps in the production of Semiconductor chips, plasmaprocessing is required for three main reasons. First, electrons are used to dissociatethe input gas into atoms. Second, the etch rate is greatly enhanced by ion bombard-ment, which breaks the bonds in the first few monolayers of the surface, allowing theetchant atoms, usually Cl or F, to combine with substrate atoms to form volatilemolecules.

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