PolyMUMPs Design Handbook - MEMSCAP

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PolyMUMPs Design Handbook a MUMPs process Allen Cowen, Busbee Hardy, Ramaswamy Mahadevan, and Steve Wilcenski MEMSCAP Inc. Revision Copyright 1992-2011 by MEMSCAP . All rights reserved. Permission to use and copy for internal, noncommercial purposes is hereby granted. Any distribution of this manual or associated layouts or any part thereof is strictly prohibited without prior written consent of MEMSCAP . Inc. GDSII is a trademark of Calma, Valid, Cadence. L-Edit and Tanner Database are trademarks of Tanner Research Inc. Table of Contents chapter 1.

3-LAYER POLYSILICON SURFACE MICROMACHINING PROCESS 1 PolyMUMPs Design Handbook, Rev. 13.0 Chapter 1 Three-Layer Polysilicon Surface Micromachining Process 1.1 Introduction The Multi-User MEMS Processes, or MUMPs®, is a commercial program that provides cost-effective, proof-of- concept MEMS fabrication to industry, …

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