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Mems Variable Capacitors For Tunable Filters
Found 3 free book(s)RF MEMs Variable Capacitors for Tunable Filters
www.memtronics.comRF MEMs Variable Capacitors for Filters 363 Figure 1. Cross-section of an RF MEMs capacitor in the unactuated a and actuated b positions. . . tric surface, forming a low impedance RF path to
RF MEMS-Based Tunable Filters - MEMtronics
www.memtronics.comRF MEMS-Based Tunable Filters 277 DevelopmentofRFMEMSswitcheshasbeen underwayseriouslysinceabout1995fromseveral industrial and university groups.
RF-MEMS Devices for Wireless Communications
www.fujitsu.com無線通信用RF-MEMSデバイス FUJITSU.56, 4, (07,2005) 335 フィルタの設計は 圧電薄膜(AlNまたはZnO) h キャビティ Si fo=V/2h Si バルク振動