Overview of MEMS Gyroscopes: History, Principles of ...

A.A. Trusov - MEMS Gyroscopes 4 | Page UC Irvine, May 2011 (a) fabricated wafer (b) gyroscope die (c) vacuum package . Figure 1: Photographs of a wafer-level fabricated silicon-on-isolator gyroscope with capacitive transduction designed, fabricated, and packaged at the University of California, Irvine. Vibratory Gyroscope Dynamics

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