Surface Engineering and Coatings

Ion Beam Sputtering A physical vapor deposition process in which the coating material (target) is removed from the surface of the coating source (cathode) by a flux of high energy ions and deposited upon the surface of substrates. It can also be used to sputter-off or clean substrate surface Dual-ion-beam sputtering

  Beam, Sputtering, Ion beam sputtering, Beam sputtering