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Applications of ICP-MS - Agilent

www.agilent.com

May 01, 2012 · semiconductor applications increased rapidly in the 1990s, with the development of “cool plasma” on the HP 4500 instrument. Cool plasma allowed Na, K, Ca, and Fe to be determined at trace levels by ICP-MS, so semiconductor manufacturers and chemical suppliers no longer needed graphite furnace AAS to measure these elements. SEMI …

  Applications, Semiconductors, Semiconductor applications

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