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Deep Trench Metrology Challenges for 75nm

www.metryx.net

Deep Trench Metrology Challenges for 75nm DRAM Technology Peter Weidner, Alexander Kasic, Thomas Hingst Thomas Lindner, Qimonda, Dresden, Germany

  Challenges, Deep, Metrology, Trench, Deep trench metrology challenges for 75nm, 75nm

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