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˘ˇˆ - MicroChem

www.microchem.com

Figure 1. Spin speed vs. thickness curves for selected SU-8 resists. Soft Bake After the resist has been applied to the substrate, it must be soft baked to evaporate the solvent and densify the film.

  Su 8

SU-8 3000 Data Sheet ver 4.2

microchem.com

SU-8 3000 Permanent Epoxy Negative Photoresist SU-8 3000is a high contrast, epoxy based photoresist designed for micromachining and other microelectronic applications, where a thick, chemically and thermally stable image is desired.

  Photoresist, Su 8, Photoresist su 8

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