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Search results with tag "Dry etching"
Reduction of Device Damage During Dry Etching of …
www.plasmatherm.comReduction of Device Damage During Dry Etching of Advanced MMIC Devices Using Optical Emission Spectroscopy D. Johnson, R. Westerman, M. DeVre, Y. …
Recent Advances in GaN Dry Etching Process Capabilities
www.plasma-therm.comAdvances in GaN Dry Etching Process Capabilities Mike DeVre, Applications Lab Manager, Compound Semi & Microtechnology, Unaxis Wafer Processing