Microvalves and Micropumps for BioMEMS - Semantic Scholar

Keywords: microvalve; micropump; microfluidics; review 1. Introduction Microvalves and micropumps form the foundation of many different microfluidic systems. Microvalves control routing, timing, and separation of fluids within a microfluidic device and are crucial ... Microvalves and Micropumps for BioMEMS …

  Microfluidic, Micropump, Microvalves and micropumps for biomems, Microvalves, Biomems