Transcription of 資料2－1（131216 2030時点） [互換モード]
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資料2－1（131216 2030時点） [互換モード]
1 *1 *2 12000140001 1,935 2009 40,00050,0003 2,669 3 7,155 4 1,151 600080001000010,00020,00030,000200040000 2011 2013 2015 01998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 GPS,RFID *1 2012 / *2 XXII 2 mems mems MicroElectroMechanicalSystemsMEMS micro electro mechanical Systems / mems IC MEM
MEMSセンサ市場予測 MEMS：Micro Electro Mechanical Systems 半導体製造技術やレーザー加工技術等、各種の微細加工技術を応用し、微小な電気要素と機械要
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