Transcription of RF MEMs Variable Capacitors for Tunable Filters - …
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RF MEMs Variable Capacitors for Tunable Filters - …
RF mems Variable Capacitors for Tunable FiltersCharles L. Goldsmith, Andrew Malczewski, Zhimin J. Yao, Shea Chen, John Ehmke,David H. HinzelRaytheon Systems Corporation, 13510 N. Central Expressway, MS 35 Dallas, Texas 75243 Recei ed 27 July 1998; re ised 30 December 1998()ABSTRACT: An RF mems microelectromechanical system Variable capacitor has beendemonstrated with a 22:1 tuning range, tuning from to pF of capacitance. Thiscapacitor was constructed using bistable mems membrane Capacitors with individualtuning ranges of 70:1 to 100:1, control voltages in the 30 55 V range, switching speeds lessthan 10mS, and operating frequencies as high as 40 GHz. These devices may eventuallyprovide a viable alternative to electronic varactors with improved tuning range and John Wiley & Sons, Inc. Int J RF and Microwave CAE 9: 362]374, : mems ; microelectromechanical system; Tunable Capacitors varactors; membranecapacitor; Tunable filterI.
RF MEMs Variable Capacitors for Filters 363 Figure 1. Cross-section of an RF MEMs capacitor in the unactuated a and actuated b positions. . . tric surface, forming a low impedance RF path to
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