Transcription of RF MEMS-Based Tunable Filters - MEMtronics
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RF MEMS-Based Tunable Filters - MEMtronics
RF MEMS-Based Tunable Filters James Brank, Jamie Yao, Mike Eberly, Andrew Malczewski, Karl Varian, Charles Goldsmith Raytheon Systems Company, P. O. Box 660246 MS 35, Dallas, Texas 75266. Accepted 17 May 2001. ABSTRACT: This paper overviews the application of RF mems switches in Tunable lters as well as circuit developments for bandpass lters covering 110 MHz to GHz. RF mems . have several desirable features, including small size, low power requirements, and low loss. The basic operation of Raytheon's RF mems capacitive membrane switch is described. An overview of the technique used to integrate the switch into a variable capacitor structure with sixteen capacitance states is provided.
RF MEMS-Based Tunable Filters 277 DevelopmentofRFMEMSswitcheshasbeen underwayseriouslysinceabout1995fromseveral industrial and university groups.
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