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2011EDITION - JEITA半導体部会

INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS 2011 EDITION micro - electro - mechanical SYSTEMS ( mems ) THE ITRS IS DEVISED AND INTENDED FOR TECHNOLOGY ASSESSMENT ONLY AND IS WITHOUT REGARD TO ANY COMMERCIAL CONSIDERATIONS PERTAINING TO INDIVIDUAL PRODUCTS OR EQUIPMENT. THE INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS: 2011 International Technology Roadmap for Semiconductors 2011 Edition( 2011 ) ITRS STRJ JEITA ITRS STRJ 15 WG: Working Group ITRS 20 1000 ITRS STRJ ITRS ITRS ITRS 2005 ITRS 2007 ITRS ITRS 2009 ITRS ITRS Microsoft Excel ITRS STRJ JEITA STRJ

international technology roadmap for semiconductors 2011edition micro-electro-mechanical systems (mems) the itrs is devised and intended for technology assessment only and is without regard to any commercial considerations pertaining to individual products or equipment. the international technology roadmap for semiconductors: 2011

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  System, Micro, Mechanical, Electro, Mems, Micro electro mechanical systems

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