Transcription of 2011EDITION - JEITA半導体部会
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2011EDITION - JEITA半導体部会
INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS 2011 EDITION micro - electro - mechanical SYSTEMS ( mems ) THE ITRS IS DEVISED AND INTENDED FOR TECHNOLOGY ASSESSMENT ONLY AND IS WITHOUT REGARD TO ANY COMMERCIAL CONSIDERATIONS PERTAINING TO INDIVIDUAL PRODUCTS OR EQUIPMENT. THE INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS: 2011 International Technology Roadmap for Semiconductors 2011 Edition( 2011 ) ITRS STRJ JEITA ITRS STRJ 15 WG: Working Group ITRS 20 1000 ITRS STRJ ITRS ITRS ITRS 2005 ITRS 2007
international technology roadmap for semiconductors 2011edition micro-electro-mechanical systems (mems) the itrs is devised and intended for technology assessment only and is without regard to any
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