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74 IEEE MICROWAVE AND WIRELESS …

74 IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, VOL. 15, NO. 2, FEBRUARY 2005A Low Loss RF MEMSKu-Band IntegratedSwitched Filter BankIsak C. Reines, Charles L. Goldsmith, Christopher D. Nordquist, Christopher W. Dyck, Garth M. Kraus,Thomas A. Plut, Patrick S. Finnegan, Franklin Austin IV, and Charles T. SullivanAbstract A switched Ku-band filter bank has been developedusing two single-pole triple-throw (SP3T) microelectromechanicalsystems ( mems ) switching networks, and three fixed three-poleend-coupled bandpass filters. A tuning range of from GHz was achieved with a fractional bandwidth of ,and mid-band insertion loss ranging from to Terms End-coupled filters, microelectromechanicalsystems ( mems ) filters, mems devices, microstrip filters, RFMEMS, tunable INTRODUCTIONLOW loss, tunable bandpass filters are critical co

REINES et al.: LOW LOSS RF MEMS Ku-BAND INTEGRATED SWITCHED FILTER BANK 75 Fig. 2. Photomicrograph of SP3T switch. series switch is activated to the down state at any time, there are

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