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74 IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, …

74 IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, VOL. 15, NO. 2, FEBRUARY 2005A Low loss RF MEMSKu-Band IntegratedSwitched filter BankIsak C. Reines, Charles L. Goldsmith, Christopher D. Nordquist, Christopher W. Dyck, Garth M. Kraus,Thomas A. Plut, Patrick S. Finnegan, Franklin Austin IV, and Charles T. SullivanAbstract A switched Ku-band filter bank has been developedusing two single-pole triple-throw (SP3T) microelectromechanicalsystems ( mems ) switching networks, and three fixed three-poleend-coupled bandpass filters. A tuning range of from GHz was achieved with a fractional bandwidth of ,and mid-band insertion loss ranging from to Terms End-coupled filters, microelectromechanicalsystems ( mems ) filters, mems devices, microstrip filters, RFMEMS, tunable INTRODUCTIONLOW loss , tunable bandpass filters are critical componentsin r

REINES et al.: LOW LOSS RF MEMS Ku-BAND INTEGRATED SWITCHED FILTER BANK 75 Fig. 2. Photomicrograph of SP3T switch. series switch is activated to the down state at any time, there are always two series switches and one shunt switch in the up state

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  Loss, Filter, Mems, Low loss rf mems

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