Transcription of 液晶ディスプレイ用Al-Nd系合金配線薄膜および 同合金ス …
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液晶ディスプレイ用Al-Nd系合金配線薄膜および 同合金ス …
FEATURE : Electronic Materials Al-Nd .. Developments in Al-Nd Alloy Interconnections and Sputtering Targets for Liquid Crystal Displays Dr. Takashi Onishi Eiji Iwamura Katsutoshi Takagi Kazuo Yoshikawa Al-Nd alloy films were developed for the interconnection of advanced liquid crystal displays. Microstructure and its change upon heating of Al-Nd alloy films directly affect stress relaxation behavior. Solid-solution hard- ening and controlling Al film stress relaxation by maintaining Nd at 2 in the alloy were found to be effective in suppressing hillocks up to 400 . Al-Nd alloy films exhibit low electrical resistivity less than 6 cm after the heating and form a high-quality insulation layer under anodization. The results indicate that Al-Nd alloy films are suitable for LCD interconnections and their practical application is promising . LCD . 14 . 15 .. 1 . 3 . Al LSI . LCD Ti Cr Mo Ta Al . 4 . 7 .. 50 cm LCD.
Al-Ta system Al-Nd system Coordination Number Interatomic Distance Ta Content at％ Coordination Number Interatomic Distance Å Al3Ta Al3Ta Al3Nd Al 3Nd 18
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