Transcription of aluminium etching - MicroChemicals
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AluminiumEtchingRevised: 2013-11-07 , wafers, plating solutions, etchants and solvents ..Phone: +49 731 977343 0 chemicals concentrations mentioned in this chapter with a * refer to a conventional concen-tration listed in the last section of this has a density of g/cm3 and thereforebelongs to the light metals. Its crystal structure is cu-bic face to its high electric conductivity, aluminium is usedfor conductors in microelectronics where it is often al-loyed with copper in order to prevent electro migra-tion, or with silicon in order to prevent the formationof (silicon-consuming) aluminium -silicon a standard potential of V, aluminium doesnot belong to the noble metals.
Aluminium Etching Revised: 2013-11-07 Source: www.microchemicals.com/downloads/application_notes.html Photoresists, wafers, plating solutions, etchants and solvents ...
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