Transcription of aluminium etching - MicroChemicals
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aluminium etching - MicroChemicals
AluminiumEtchingRevised: 2013-11-07 , wafers, plating solutions, etchants and solvents ..Phone: +49 731 977343 0 chemicals concentrations mentioned in this chapter with a * refer to a conventional concen-tration listed in the last section of this has a density of g/cm3 and thereforebelongs to the light metals. Its crystal structure is cu-bic face to its high electric conductivity, aluminium is usedfor conductors in microelectronics where it is often al-loyed with copper in order to prevent electro migra-tion, or with silicon in order to prevent the formationof (silicon-consuming) aluminium -silicon a standard potential of V, aluminium doesnot belong to the noble metals. However, the forma-tion of a very thin (few nm) Al2O3 film makes it very inert in many substances.
Photoresists, wafers, plating solutions, etchants and solvents ... Phone: +49 731 977343 0 www.microchemicals.eu sales@microchemicals.eu-3-
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