Transcription of chromium etching - MicroChemicals
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chromium etching - MicroChemicals
chromium EtchingRevised: 2013-11-07 , wafers, plating solutions, etchants and solvents ..Phone: +49 731 977343 0 chemicals concentrations mentioned in this chapter with a * refer to a conventional concen-tration listed in the last section of this is a hard metal with good adhesion tomany materials. Therefore, in the field of micro-structuring chromium is used for photo masks andas adhesion promotor for subsequently etching MechanismChromium etchants typically are mixtures of perchloric acid (HClO4), and ceric ammoniumnitrate (NH4)2[Ce(NO3)6].Perchloric acid is a very strong acid and therefore almost completely dissociated in aqueoussolutions (pKS < -8), and serves for chemically stabilizing the ceric ammonium nitrate. Cericammonium nitrate itself is a very strong following chemical equation summarizes the mechanism of chromium etching with per-chloric acid and ceric ammonium nitrate:3 Ce(NH4)2(NO3)6 + Cr 3 Cr(NO3)3 + 3 Ce(NH4)2(NO3)5 ,Hereby the cerium oxidation state is reduced from IV to III, whereas the chromium oxidationstate increases from II to nitrate steadily produced during etching forms a dark film on the chromium surfaceand - due to its aqueous solubility - is dissolved in the , silver and vanadium are strongly etched by th
Photoresists, wafers, plating solutions, etchants and solvents ... Phone: +49 731 977343 0 www.microchemicals.eu sales@microchemicals.eu-2-
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