Transcription of An Introduction to MEMS (Micro-electromechanical Systems)
{{id}} {{{paragraph}}}
Prime Faraday Technology Watch ISBN 1-84402-020-7 An Introduction to MEMS January 2002 An Introduction to MEMS (Micro-electromechanical Systems) MEMS has been identified as one of the most promising technologies for the 21st Century and has the potential to revolutionize both industrial and consumer products by combining silicon-based microelectronics with micromachining technology. Its techniques and microsystem-based devices have the potential to dramatically affect of all of our lives and the way we live. This report presents a general Introduction to the field of MEMS, with emphasis on its commercial applications and device fabrication methods. It also describes the range of MEMS sensors and actuators, the phenomena that can be sensed or acted upon with MEMS devices, and outlines the major challenges facing the industry.
automotive, medical, electronic, communication and defence applications. Current MEMS devices include accelerometers for airbag sensors, inkjet printer heads, computer disk drive read/write heads, projection display chips, blood pressure sensors, optical switches,
Domain:
Source:
Link to this page:
Please notify us if you found a problem with this document:
{{id}} {{{paragraph}}}