Transcription of Areviewofdesignconsiderationsforthesensormatrixin ...
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Areviewofdesignconsiderationsforthesensormatrixin ...
UNCORRECTED PROOFN uclear Instruments and Methods in Physics Research A 0 (2001) 1 30A review of design considerations for the sensor matrix insemiconductor pixel detectors for trackin gin particle physicsexperimentsSally Seidel*New Mexico Center for Particle Physics, Department of Physics and Astronomy, University of New Mexico,800 Yale Blvd NE, Albuquerque, NM 87131 USAR eceived 9 December 2000; accepted 26 January 2001 AbstractMethods have been developed to improve the reliability of silicon sensors, in particular for pixel detectors, and theirresistance to radiation damage, as it is encountered in tracking detectors in particle physics experiments. The choice ofwafer material, the processin gtechniques, and the sensor layout are discussed. Alternative semiconductor substratesand variations on the planar hybrid design are mentioned.
UNCORRECTED PROOF NuclearInstrumentsandMethodsinPhysicsResearchA0(2001)1–30 …
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