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Basic Wavefront Aberration Theory for Optical Metrology

APPLIED OPTICS AND Optical ENGINEERING, VOL. XlCHAPTER 1 Basic Wavefront Aberration Theoryfor Optical MetrologyJAMES C. WYANTO ptical Sciences Center, University of ArizonaandWYKO Corporation, Tucson, ArizonaKATHERINE CREATHO ptical Sciences CenterUniversity of Arizona, Tucson, ConventionsAberration-Free ImageSpherical Wavefront , Defocus, and Lateral ShiftAngular, Transverse, and Longitudinal AberrationSeidel AberrationsA. Spherical AberrationB. Coma C. Astigmatism D. Field Curvature E. Distortion Zernike PolynomialsRelationship between Zernike Polynomials and Third-OrderAberrationsPeak-to-Valley and RMS Wavefront AberrationStrehl RatioChromatic AberrationsAberrations Introduced by Plane Parallel PlatesAberrations of Simple Thin

The second property of Zernike polynomials is that the radial function ... Rewriting the Zernike expansion of Eq. (57), first- and third-order field-independent wavefront aberration terms are obtained. This is done by. ... Equation (59) can be rearranged using the identity

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