Transcription of クリーンルーム空気清浄度 ... - Beckman Coulter
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クリーンルーム空気清浄度 ... - Beckman Coulter
(ISO 14644-1 2015) Particle Counting & Characterization Application Note. Introduction 1963 FED-STD-209 ISO 14644-1 2001 11 1 1 ft3 m 100 1 ft3 m 100 1999 ISO 14644-1 1 m3 m 1 ft3 = m3 2015 12 ISO 14644-1 1999 ISO 14644-1:2015 m 2 /m3 m 4 /m3 m 8 /m3 m 29 /m3 4 ISO 14644-1:2015 mClass 110 (2)Class 21002410 (4)Class 311,00023710235 (8)Class 41010,0002,3701,02035283 Class 5100100,00023,70010,2003,520832 (29)Class 61,0001,000,000237,000102,00035,2008,320 293 Class 710,000352,00083,2002,930 Class 8100,0003,520,000832,00029,300 Class 935,200,0008,320,000293,000 / m3) ( )ISO 1464
クリーンルーム空気清浄度評価法の 改正ポイントについて (ISO 14644-1：2015) . Particle Counting & Characterization Application Note.
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