Transcription of クリーンルーム空気清浄度 ... - Beckman Coulter
1 (ISO 14644-1 2015) Particle Counting & Characterization Application Note. Introduction 1963 FED-STD-209 ISO 14644-1 2001 11 1 1 ft3 m 100 1 ft3 m 100 1999 ISO 14644-1 1 m3 m 1 ft3 = m3 2015 12 ISO 14644-1 1999 ISO 14644-1:2015 m 2 /m3 m 4 /m3 m 8 /m3 m 29 /m3 4 ISO 14644-1:2015 mClass 110 (2)Class 21002410 (4)Class 311,00023710235 (8)Class 41010,0002,3701,02035283 Class 5100100,00023,70010,2003,520832 (29)Class 61,0001,000,000237,000102,00035,2008,320 293 Class 710,000352,00083,2002,930 Class 8100,0003,520,000832,00029,300 Class 935,200,0008,320,000293,000 / m3) ( )ISO 14644-1(2015)
2 M3 Table 1000 m2 Table 95% UCL 2 9 95% 1 3 2 1 ISO21501-4:2007 ISO21504-1 1 ISO21504-1 JIS B9920 (m2) (NL) (m2) (NL) 2 1 76 15 4 2 104 16 6 3 108 17 8 4 116 18 10 5 148 19 24 6 156 20 28 7 192 21 32 8 232 22 36 9 276 23 52 10 352 24 56 11 436 25 64 12 636 26 68 13 1000 27 72 14 > 1000 NL 27 ( /1000)
