Transcription of chromium etching - MicroChemicals
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chromium EtchingRevised: 2013-11-07 , wafers, plating solutions, etchants and solvents ..Phone: +49 731 977343 0 chemicals concentrations mentioned in this chapter with a * refer to a conventional concen-tration listed in the last section of this is a hard metal with good adhesion tomany materials. Therefore, in the field of micro-structuring chromium is used for photo masks andas adhesion promotor for subsequently etching MechanismChromium etchants typically are mixtures of perchloric acid (HClO4), and ceric ammoniumnitrate (NH4)2[Ce(NO3)6].Perchloric acid is a very strong acid and therefore almost completely dissociated in aqueoussolutions (pKS < -8), and serves for chemically stabilizing the ceric ammonium nitrate.
Chromium Etching Revised: 2013-11-07 Source: www.microchemicals.com/downloads/application_notes.html Photoresists, wafers, plating solutions, etchants and solvents ...
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