Transcription of Cleanroom Considerations for ESD Control - SEMI
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Cleanroom Considerations for ESD Control - SEMI
Cleanroom Considerations for ESD Control Christopher W. Long IBM. 2007 SEMI NA ESD Workshop Agenda z Cleanroom /Environment Static Charge Challenges z Control Strategies z Case Studies z Summary and Acknowledgements Static Charge Problems: Contamination and ESD. Static Charge +. Static Charge + --- --- -- --- + +. +. --- --- + --- Yield Throughput Pellicles Wafers Equipment Equipment Surfaces Integrated Circuits Reticles Contamination ESD Damage Process Interruptions Clean Environments and Static Charge z Clearly many industries require Clean Manufacturing . z But with Clean Manufacturing also comes: Lowered Humidity Levels Process-Required Insulators Ultra-Clean Surfaces Processes which involve product movement Lack of naturally occurring ions z All of which can be contributors to elevated static charge levels in and around product Static Charge and Humidi
Cleanroom Considerations for ESD Control Christopher W. Long IBM 2007 SEMI NA ESD Workshop
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