Transcription of D-SIMS（ダイナミックSIMS）について 2016年7 …
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D-SIMS（ダイナミックSIMS）について 2016年7 …
CAMECA Instrument Japan July 2016 SISS-18 SIMS SIMS D-SIMS SIMS 2016 7 20 CAMECA Instrument Japan July 2016 SISS-18 SIMS 1. D-SIMS Static SIMS 2. D-SIMS 3. 4. CAMECA Instrument Japan July 2016 SISS-18 SIMS 1. D-SIMS Static SIMS 2. D-SIMS 3. 4. CAMECA Instrument Japan July 2016 SISS-18 SIMS D-SIMS D-SIMS(Dynamic SIMS)Static SIMS(ToF-SIMS)Si E15cm-21 (>1e13 ions) (<1e13 ions) O CsAr,Ga,Au, 10 20nmX 2 CAMECA Instrument Japan July 2016 SISS-18 SIMS 1 1 O2+, 10keV, Cs2+, 10keV, D-SIMS 2 CAMECA Instrument Japan July 2016 SISS-18 SIMS D-SIMS ppm ppb ( m nm ) CAMECA Instrument Japan July 2016 SISS-18 SIMS MATRIX ELEMENT DETECTION LIMIT (at/cm3)
CAMECA Instrument Japan K.K. 20 July 2016 SISS-18 SIMS基礎講座 D-SIMSとは？ D-SIMS (Dynamic SIMS) Static SIMS (ToF-SIMS) Si表面の原子数 ＝1E15cm-2
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