D-SIMS（ダイナミックSIMS）について 2016年7 …

1 CAMECA Instrument Japan July 2016 SISS-18 SIMS SIMS D-SIMS SIMS 2016 7 20 CAMECA Instrument Japan July 2016 SISS-18 SIMS 1. D-SIMS Static SIMS 2. D-SIMS 3. 4. CAMECA Instrument Japan July 2016 SISS-18 SIMS 1. D-SIMS Static SIMS 2. D-SIMS 3. 4. CAMECA Instrument Japan July 2016 SISS-18 SIMS D-SIMS D-SIMS(Dynamic SIMS)Static SIMS(ToF-SIMS)Si E15cm-21 (>1e13 ions) (<1e13 ions) O CsAr,Ga,Au, 10 20nmX 2 CAMECA Instrument Japan July 2016 SISS-18 SIMS 1 1 O2+, 10keV, Cs2+, 10keV, D-SIMS 2 CAMECA Instrument Japan July 2016 SISS-18 SIMS D-SIMS ppm ppb ( m nm ) CAMECA Instrument Japan July 2016 SISS-18 SIMS MATRIX ELEMENT DETECTION LIMIT (at/cm3)

2 Si 100 = 5 1022 at/cm3H C N O B 7 1016 3 1016 5 1014 6 1016 1 1013 F 5 1015 Al 1 1014 P 1 1014 Cr 2 1013 Fe 5 1014 Ni 3 1014 Cu 8 1014 As 5 1013 Ag 5 1014 Pb 1 1014 (5E16 = 1ppm5E13 = 1ppb)Si SIMS H ppm CAMECA Instrument Japan July 2016 SISS-18 SIMS D-SIMS IC error ellipses are SIMSCAMECA Instrument Japan July 2016 SISS-18 SIMS 1. D-SIMS Static SIMS 2. D-SIMS 3. 4. CAMECA Instrument Japan July 2016 SISS-18 SIMS SIMS To F O, Cs, Ar, Ga, Instrument Japan July 2016 SISS-18 SIMS SIMS IMS 7fADEPT1010 CAMECA Instrument Japan July 2016 SISS-18 SIMS O2+107101 /10-9C Cs+107101 /10-9C O2+ Cs+ CAMECA Instrument Japan July 2016 SISS-18 SIMS Cameca, Phi Ion-ToF Atomika RF Cameca WF, NS50L O D-SIMS O Cs Cs Cameca, Phi.

3 Atomika - Cameca - Ion-ToF Cs IMS-7f 2 CAMECA Instrument Japan July 2016 SISS-18 SIMS Cs Cs Cameca Micro-beam Cs sourceW 1100 C W 1100 C Cs GIC CamecaPhi Cameca Phi GICCs W filament CAMECA Instrument Japan July 2016 SISS-18 SIMS O Duoplasmatron Gas (O2, Ar, N2, etc.) / +-++- SIMS CAMECA Instrument Japan July 2016 SISS-18 SIMS Q-pole Sector TOF DynamicDynamicStatic (& Dynamic) 2000 10,000 10,000 1 m/z 1,000 High Mass ( ) MOS Gatedielectrics MOS Shallow Junction m ( Shallow Depth Profile)

4 D-SIMS CAMECA Instrument Japan July 2016 SISS-18 SIMS Energy Slit Entrance Slit Exit Slit Field Aperture SIMS ESA CAMECA Instrument Japan July 2016 SISS-18 SIMS B ESA < < ESA BqMEr 2 R IMS 3 7f 117 mm IMS1270/80 585 mm CAMECA Instrument Japan July 2016 SISS-18 SIMS Double Focus Mass Analyzer ESA ESA ESA = CAMECA Instrument Japan July 2016 SISS-18 SIMS CAMECA Instrument Japan July 2016 SISS-18 SIMS 1.

5 D-SIMS Static SIMS 2. D-SIMS 3. 4. CAMECA Instrument Japan July 2016 SISS-18 SIMS CAMECA Instrument Japan July 2016 SISS-18 SIMS SIMS M/ M = 395731P: vs 30 + 1 = ( ) E=mc2 SIMS M/ M > 10000 Si P Si P N 31P( 31) 31 SiH( 30 Si+1H) CAMECA Instrument Japan July 2016 SISS-18 SIMS 4 P Si P H Si P 000,25 MMProfile obtained with LMR (quad)CAMECA Instrument Japan July 2016 SISS-18 SIMS Cameca IMS-6f DL 1E13 at/cm3DL 1E14 at/cm3DL 1E13 at/cm3-11 BRp= , nm1e131e141e151e161e17 Conc, atom/cm375As 28Si20040060080010001200140016001800 Depth, nm1e141e151e161e171e18 Conc, atom/cm331P50010001500200025003000350040 00D epth, nm1e131e141e151e161e171e18 Conc, atom/cm311B 28Si11B 28Si1H, 25 nm/sec05001000 1500 2000 2500 3000 3500 4000 4500 Depth, nm1e171e181e19 Conc, atom/cm31 HDL 5E16 nm/sdose = dose = dose = 9e12at/cm2 dose = Rp= 1E13at/cm3DL 1E13at/cm3DL 1E14at/cm3 CAMECA Instrument Japan July 2016 SISS-18 SIMS + + + + + +210204060801001200100200300400 Concentration (at/cm3)Intensity ( )Depth (nm)C H AlO In H, C, O SIMS.

6 DL H DL CDL O(at/cm3)(at/cm3)(at/cm3) + + +16 SIMS GaN LEDCAMECA Instrument Japan July 2016 SISS-18 SIMS Mg, Al, K, Ca, Ti, Cu Anal. Cond.: Cs+, 15 keVSample : Poly- Silicon Large field of view (500 x 500 m2) Lateral resolution of few m2 SIMS CAMECA Instrument Japan July 2016 SISS-18 SIMS SIMS SIMS 35% enriched UraniumIsotope Pattern Cs CAMECA Instrument Japan July 2016 SISS-18 SIMS SIMS 2 1 2 BG CAMECA Instrument Japan July 2016 SISS-18 SIMS SIMS Matrix A SIMS 2 IA IB B X M X M 0100020003000 Seconds100101102103104105106 Boron Ion counts103104105106107Al, P Ion Counts11B31P 27Al2 AlGaInP LD AlGaInP/GaAs B Boron 1 2 GaAsAlGaInPSIMS CAMECA Instrument Japan July 2016 SISS-18 SIMS SIMS D-SIMS Cs O DC