Transcription of Defect and Yield Analysis of Semiconductor Components …
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Defect and Yield Analysis of Semiconductor Components …
HELSINKI UNIVERSITY OF TECHNOLOGY Department of Electrical and Communication Engineering Optoelectronics Laboratory Espoo, Finland 2003 Defect and Yield Analysis of Semiconductor Components and Integrated Circuits Mika Karilahti Dissertation for the degree of Doctor of Science in Technology to be presented with due permission for public examination and debate in Auditorium S4 of the Department of Electrical and Communications Engineering at Helsinki University of Technology (Espoo, Finland) on the 14th of February, 2003, at 12 o clock noon. ii Helsinki University of Technology Department of Electrical and Communications Engineering Optoelectronics Laboratory Box 3500 FIN-02015 HUT Espoo Tel. +358-9-4511 Fax. +358-9-4513128 Mika Karilahti 1993-2003 Contact information: Email: , , URL: , Tel: +358-40-5487656 ISBN 951-22-6368-8 (Printed) ISBN 951-22-6370-X (PDF) Picaset Oy Espoo, Finland 2003 iiiAbstract semiconductors were studied from the point of material, component, electrical and functional properties.
Defect and Yield Analysis of Semiconductor Components and Integrated Circuits Mika Karilahti ... (DESY) in Hamburg, Germany. I want to thank all institutes for the facilities, resources, and services they have been able to provide, and all the very helpful people there.
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