Transcription of HIGH PERFORMANCE CLEANROOMS
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HIGH PERFORMANCE CLEANROOMS
HIGH PERFORMANCECLEANROOMSA Design Guidelines SourcebookJanuary 2006 TABLE OF Air Change Demand Controlled Dual Temperature Chilled Water Exhaust Fan- filter Low Pressure Drop Air Recirculation Air System Vacuum Pump Waterside Free design is a challenging field dominated by the need for high reliability,maintenance of strict space cleanliness requirements, life safety, and narrow temperature and humidity control bands. By necessity, efficiency is a lower priority in design. But there are a number of design approaches that have been shown to meet all the requirements of acleanroom facility robustly while minimizing power consumption and cost.
widely-used 99.99 percent efficient filters are three times more effective at filtering out 0.3 micron particles than the 99.97 percent filters that were common in the mid 1990’s. Ultra-low penetration air (ULPA) filters are even more efficient than those of the mid 1990’s.
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