Transcription of HIGH PERFORMANCE CLEANROOMS
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HIGH PERFORMANCE CLEANROOMS
HIGH PERFORMANCECLEANROOMSA Design Guidelines SourcebookJanuary 2006 TABLE OF Air Change Demand Controlled Dual Temperature Chilled Water Exhaust Fan-Filter Low Pressure Drop Air Recirculation Air System Vacuum Pump Waterside Free design is a challenging field dominated by the need for high reliability,maintenance of strict space cleanliness requirements, life safety, and narrow temperature and humidity control bands. By necessity, efficiency is a lower priority in design. But there are a number of design approaches that have been shown to meet all the requirements of acleanroom facility robustly while minimizing power consumption and cost.
Benchmarking has shown that most facilities are operated at or below the low range of recommended ACRs. A Sematech study has also verified that lowered air change rates in cleanrooms are adequate in maintaining cleanliness. The actual operating ACRs documented for ten ISO Class 5 cleanrooms was between 94 and 276 air changes per hour. PRINCIPLES
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